Design of a smart mount for vibration isolation in high-precision machinery

G.W. van der Poel; J. van Dijk; J.B. Jonker; H.M.J.R. Soemers

Design of a smart mount for vibration isolation in high-precision machinery

G.W. van der Poel, J. van Dijk, J.B. Jonker, H.M.J.R. Soemers

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic

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Abstract

In high-precision machines, e.g. wafer scanners or scanning electron microscopes, the achievable accuracy and repeatability is limited by (amongst others) the presence of poorly damped structural modes. These modes can be excited by floor/base vibrations and disturbances acting directly on the machine (e.g. cables, background noise or internal acceleration forces). Therefore, most precision machines are mounted on vibration isolation systems, which provide isolation from floor/base vibrations above the first resonance frequency, called the suspension mode frequency. This frequency is typically 1 Hz in these so called soft mounted machines. Unfortunately, in that case, the mount stiffness is small, which means the machine is very compliant to direct disturbances.
The goal of this research project is to develop a vibration isolation system which offers efficient vibration isolation

Original language	English
Title of host publication	25th Benelux Meeting on Systems and Control, March 13 – 15, 2006, Heeze, The Netherlands
Subtitle of host publication	Book of Abstracts
Editors	Bram de Jager, Gjerrit Meinsma
Publisher	Technische Universiteit Eindhoven
Pages	77-77
ISBN (Print)	978-90-386-2558-4
Publication status	Published - 13 Mar 2006
Event	25th Benelux Meeting on Systems and Control 2006 - Heeze, Belgium Duration: 13 Mar 2006 → 15 Mar 2006 Conference number: 25

Conference

Conference	25th Benelux Meeting on Systems and Control 2006
Country/Territory	Belgium
City	Heeze
Period	13/03/06 → 15/03/06

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@inproceedings{9c288e9396ac406da5e80f7c56d83dde,

title = "Design of a smart mount for vibration isolation in high-precision machinery",

abstract = "In high-precision machines, e.g. wafer scanners or scanning electron microscopes, the achievable accuracy and repeatability is limited by (amongst others) the presence of poorly damped structural modes. These modes can be excited by floor/base vibrations and disturbances acting directly on the machine (e.g. cables, background noise or internal acceleration forces). Therefore, most precision machines are mounted on vibration isolation systems, which provide isolation from floor/base vibrations above the first resonance frequency, called the suspension mode frequency. This frequency is typically 1 Hz in these so called soft mounted machines. Unfortunately, in that case, the mount stiffness is small, which means the machine is very compliant to direct disturbances.The goal of this research project is to develop a vibration isolation system which offers efficient vibration isolation",

author = "{van der Poel}, G.W. and {van Dijk}, J. and J.B. Jonker and H.M.J.R. Soemers",

year = "2006",

month = mar,

day = "13",

language = "English",

isbn = "978-90-386-2558-4",

pages = "77--77",

editor = "{de Jager}, Bram and Gjerrit Meinsma",

booktitle = "25th Benelux Meeting on Systems and Control, March 13 – 15, 2006, Heeze, The Netherlands",

publisher = "Technische Universiteit Eindhoven",

note = "25th Benelux Meeting on Systems and Control 2006 ; Conference date: 13-03-2006 Through 15-03-2006",

}

van der Poel, GW, van Dijk, J, Jonker, JB & Soemers, HMJR 2006, Design of a smart mount for vibration isolation in high-precision machinery. in B de Jager & G Meinsma (eds), 25th Benelux Meeting on Systems and Control, March 13 – 15, 2006, Heeze, The Netherlands: Book of Abstracts. Technische Universiteit Eindhoven, pp. 77-77, 25th Benelux Meeting on Systems and Control 2006, Heeze, Belgium, 13/03/06.

Design of a smart mount for vibration isolation in high-precision machinery. / van der Poel, G.W.; van Dijk, J.; Jonker, J.B. et al.
25th Benelux Meeting on Systems and Control, March 13 – 15, 2006, Heeze, The Netherlands: Book of Abstracts. ed. / Bram de Jager; Gjerrit Meinsma. Technische Universiteit Eindhoven, 2006. p. 77-77.

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic

TY - GEN

T1 - Design of a smart mount for vibration isolation in high-precision machinery

AU - van der Poel, G.W.

AU - van Dijk, J.

AU - Jonker, J.B.

AU - Soemers, H.M.J.R.

N1 - Conference code: 25

PY - 2006/3/13

Y1 - 2006/3/13

N2 - In high-precision machines, e.g. wafer scanners or scanning electron microscopes, the achievable accuracy and repeatability is limited by (amongst others) the presence of poorly damped structural modes. These modes can be excited by floor/base vibrations and disturbances acting directly on the machine (e.g. cables, background noise or internal acceleration forces). Therefore, most precision machines are mounted on vibration isolation systems, which provide isolation from floor/base vibrations above the first resonance frequency, called the suspension mode frequency. This frequency is typically 1 Hz in these so called soft mounted machines. Unfortunately, in that case, the mount stiffness is small, which means the machine is very compliant to direct disturbances.The goal of this research project is to develop a vibration isolation system which offers efficient vibration isolation

AB - In high-precision machines, e.g. wafer scanners or scanning electron microscopes, the achievable accuracy and repeatability is limited by (amongst others) the presence of poorly damped structural modes. These modes can be excited by floor/base vibrations and disturbances acting directly on the machine (e.g. cables, background noise or internal acceleration forces). Therefore, most precision machines are mounted on vibration isolation systems, which provide isolation from floor/base vibrations above the first resonance frequency, called the suspension mode frequency. This frequency is typically 1 Hz in these so called soft mounted machines. Unfortunately, in that case, the mount stiffness is small, which means the machine is very compliant to direct disturbances.The goal of this research project is to develop a vibration isolation system which offers efficient vibration isolation

M3 - Conference contribution

SN - 978-90-386-2558-4

SP - 77

EP - 77

BT - 25th Benelux Meeting on Systems and Control, March 13 – 15, 2006, Heeze, The Netherlands

A2 - de Jager, Bram

A2 - Meinsma, Gjerrit

PB - Technische Universiteit Eindhoven

T2 - 25th Benelux Meeting on Systems and Control 2006

Y2 - 13 March 2006 through 15 March 2006

ER -

Design of a smart mount for vibration isolation in high-precision machinery

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