Design of a smart mount for vibration isolation in high-precision machinery

G.W. van der Poel, J. van Dijk, J.B. Jonker, H.M.J.R. Soemers

    Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademic

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    Abstract

    In high-precision machines, e.g. wafer scanners or scanning electron microscopes, the achievable accuracy and repeatability is limited by (amongst others) the presence of poorly damped structural modes. These modes can be excited by floor/base vibrations and disturbances acting directly on the machine (e.g. cables, background noise or internal acceleration forces). Therefore, most precision machines are mounted on vibration isolation systems, which provide isolation from floor/base vibrations above the first resonance frequency, called the suspension mode frequency. This frequency is typically 1 Hz in these so called soft mounted machines. Unfortunately, in that case, the mount stiffness is small, which means the machine is very compliant to direct disturbances.
    The goal of this research project is to develop a vibration isolation system which offers efficient vibration isolation
    Original languageEnglish
    Title of host publication25th Benelux Meeting on Systems and Control, March 13 – 15, 2006, Heeze, The Netherlands
    Subtitle of host publicationBook of Abstracts
    EditorsBram de Jager, Gjerrit Meinsma
    PublisherTechnische Universiteit Eindhoven
    Pages77-77
    ISBN (Print)978-90-386-2558-4
    Publication statusPublished - 13 Mar 2006
    Event25th Benelux Meeting on Systems and Control 2006 - Heeze, Belgium
    Duration: 13 Mar 200615 Mar 2006
    Conference number: 25

    Conference

    Conference25th Benelux Meeting on Systems and Control 2006
    CountryBelgium
    CityHeeze
    Period13/03/0615/03/06

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