Design of a VDF/TrFE Copolymer-on-silicon pyroelectric sensor

D. Setiadi; D. Setiadi; Paulus P.L. Regtien

doi:10.1109/ISE.1994.515256

Design of a VDF/TrFE Copolymer-on-silicon pyroelectric sensor

D. Setiadi, D. Setiadi, Paulus P.L. Regtien

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

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154 Downloads (Pure)

Abstract

This paper presents a design of a VDF/TrFE copolymer-on-silicon pyroelectric sensor. For an optimal design of a VDF/TrFE-on-silicon pyroelectric sensor, the one-dimensional diffusion equation is solved for the pyroelectric multilayer structure. The output current of the sensor is calculated. Improvement of the sensor can be obtained by: (a) etching the silicon substrate under the sensor element, and (b) an additional VDF/TrFE copolymer layer as thermal isolation. Different noise sources for a pyroelectric sensor have been calculated. The dielectric noise dominates the noise sources. This conclusion has been verified by measured values

Original language	Undefined
Title of host publication	8th Interational symposium on electrets
Place of Publication	Paris, France
Pages	967-972
Number of pages	7
DOIs	https://doi.org/10.1109/ISE.1994.515256
Publication status	Published - 7 Sep 1994
Event	8th International Symposium on Electrets, ISE 8 - Paris, France Duration: 7 Sep 1994 → 9 Sep 1994

Conference

Conference	8th International Symposium on Electrets, ISE 8
Period	7/09/94 → 9/09/94
Other	September 7-9, 1994

Keywords

METIS-113427
IR-16542

Access to Document

10.1109/ISE.1994.515256

Setiadi94design

Cite this

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title = "Design of a VDF/TrFE Copolymer-on-silicon pyroelectric sensor",

abstract = "This paper presents a design of a VDF/TrFE copolymer-on-silicon pyroelectric sensor. For an optimal design of a VDF/TrFE-on-silicon pyroelectric sensor, the one-dimensional diffusion equation is solved for the pyroelectric multilayer structure. The output current of the sensor is calculated. Improvement of the sensor can be obtained by: (a) etching the silicon substrate under the sensor element, and (b) an additional VDF/TrFE copolymer layer as thermal isolation. Different noise sources for a pyroelectric sensor have been calculated. The dielectric noise dominates the noise sources. This conclusion has been verified by measured values",

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year = "1994",

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doi = "10.1109/ISE.1994.515256",

language = "Undefined",

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T1 - Design of a VDF/TrFE Copolymer-on-silicon pyroelectric sensor

AU - Setiadi, D.

AU - Regtien, Paulus P.L.

PY - 1994/9/7

Y1 - 1994/9/7

N2 - This paper presents a design of a VDF/TrFE copolymer-on-silicon pyroelectric sensor. For an optimal design of a VDF/TrFE-on-silicon pyroelectric sensor, the one-dimensional diffusion equation is solved for the pyroelectric multilayer structure. The output current of the sensor is calculated. Improvement of the sensor can be obtained by: (a) etching the silicon substrate under the sensor element, and (b) an additional VDF/TrFE copolymer layer as thermal isolation. Different noise sources for a pyroelectric sensor have been calculated. The dielectric noise dominates the noise sources. This conclusion has been verified by measured values

AB - This paper presents a design of a VDF/TrFE copolymer-on-silicon pyroelectric sensor. For an optimal design of a VDF/TrFE-on-silicon pyroelectric sensor, the one-dimensional diffusion equation is solved for the pyroelectric multilayer structure. The output current of the sensor is calculated. Improvement of the sensor can be obtained by: (a) etching the silicon substrate under the sensor element, and (b) an additional VDF/TrFE copolymer layer as thermal isolation. Different noise sources for a pyroelectric sensor have been calculated. The dielectric noise dominates the noise sources. This conclusion has been verified by measured values

KW - METIS-113427

KW - IR-16542

U2 - 10.1109/ISE.1994.515256

DO - 10.1109/ISE.1994.515256

M3 - Conference contribution

SN - 0-7803-1939-7

SP - 967

EP - 972

BT - 8th Interational symposium on electrets

CY - Paris, France

Y2 - 7 September 1994 through 9 September 1994

ER -