Design of a VDF/TrFE Copolymer-on-silicon pyroelectric sensor

D. Setiadi, D. Setiadi, Paulus P.L. Regtien

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    This paper presents a design of a VDF/TrFE copolymer-on-silicon pyroelectric sensor. For an optimal design of a VDF/TrFE-on-silicon pyroelectric sensor, the one-dimensional diffusion equation is solved for the pyroelectric multilayer structure. The output current of the sensor is calculated. Improvement of the sensor can be obtained by: (a) etching the silicon substrate under the sensor element, and (b) an additional VDF/TrFE copolymer layer as thermal isolation. Different noise sources for a pyroelectric sensor have been calculated. The dielectric noise dominates the noise sources. This conclusion has been verified by measured values
    Original languageUndefined
    Title of host publication8th Interational symposium on electrets
    Place of PublicationParis, France
    Number of pages7
    Publication statusPublished - 7 Sep 1994
    Event8th International Symposium on Electrets, ISE 8 - Paris, France
    Duration: 7 Sep 19949 Sep 1994


    Conference8th International Symposium on Electrets, ISE 8
    OtherSeptember 7-9, 1994


    • METIS-113427
    • IR-16542

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