Abstract
This paper presents a design of a VDF/TrFE copolymer-on-silicon pyroelectric sensor. For an optimal design of a VDF/TrFE-on-silicon pyroelectric sensor, the one-dimensional diffusion equation is solved for the pyroelectric multilayer structure. The output current of the sensor is calculated. Improvement of the sensor can be obtained by: (a) etching the silicon substrate under the sensor element, and (b) an additional VDF/TrFE copolymer layer as thermal isolation. Different noise sources for a pyroelectric sensor have been calculated. The dielectric noise dominates the noise sources. This conclusion has been verified by measured values
Original language | Undefined |
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Title of host publication | 8th Interational symposium on electrets |
Place of Publication | Paris, France |
Pages | 967-972 |
Number of pages | 7 |
DOIs | |
Publication status | Published - 7 Sep 1994 |
Event | 8th International Symposium on Electrets, ISE 8 - Paris, France Duration: 7 Sep 1994 → 9 Sep 1994 |
Conference
Conference | 8th International Symposium on Electrets, ISE 8 |
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Period | 7/09/94 → 9/09/94 |
Other | September 7-9, 1994 |
Keywords
- METIS-113427
- IR-16542