Design, Tolerance Analysis, and Fabrication of Silicon Oxynitride Based Planar Optical Waveguides for Communication Devices

Kerstin Worhoff, Paul Lambeck, A. Driessen

Research output: Contribution to journalArticleAcademicpeer-review

128 Citations (Scopus)

Abstract

Planar optical waveguiding structures for application in communication networks are highly demanding with respect to low insertion loss, efficient fiber-to-chip coupling, polarization independent operation, high integration density, reliable fabrication, and last but not least cost efficiency. When applying silicon oxynitride, which is a very versatile material, planar waveguiding structures can be designed having the potential of meeting all those requirements. In this paper, we will describe the design of such a waveguiding structure, demonstrate the practical feasibility of realizing this structure and discuss the preliminary measurement results.
Original languageEnglish
Pages (from-to)1401-1407
Number of pages7
JournalJournal of lightwave technology
Volume17
Issue number8
DOIs
Publication statusPublished - Aug 1999

Keywords

  • Telecommunication
  • optical planar waveguides
  • EWI-20880
  • polarization independence
  • IR-23951
  • IOMS-MIS: MISCELLANEOUS
  • Chemical vapor deposition
  • METIS-128750
  • silicon oxynitride (SiON)

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