This paper reports the design, realization and characterization results of an integrated pressure / flow sensor for measuring flow-rates as well as pressures of common liquids in micro analysis systems. The sensing system comprises high accurate capacitive pressure sensors and a hydraulic resistor. An attractive feature is the simple realization process consisting of common micromachining techniques.
|Conference||1997 International Conference on Solid-State Sensors and Actuators, TRANSDUCERS 1997|
|Abbreviated title||TRANSDUCERS 97|
|Period||16/06/97 → 19/06/97|