Designing, realization and characterization of a novel capacitive pressure/flow sensor

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

19 Citations (Scopus)
82 Downloads (Pure)

Abstract

This paper reports the design, realization and characterization results of an integrated pressure / flow sensor for measuring flow-rates as well as pressures of common liquids in micro analysis systems. The sensing system comprises high accurate capacitive pressure sensors and a hydraulic resistor. An attractive feature is the simple realization process consisting of common micromachining techniques.
Original languageUndefined
Title of host publicationProceedings of the 1997 International Conference on Solid-State Sensors and Actuators. Part 1 (of 2)
Place of PublicationPiscataway
PublisherIEEE Computer Society
Pages151-154
Number of pages4
ISBN (Print)0-7803-3829-4
DOIs
Publication statusPublished - 16 Jun 1997
Event1997 International Conference on Solid-State Sensors and Actuators, TRANSDUCERS 1997 - Chicago, United States
Duration: 16 Jun 199719 Jun 1997

Publication series

Name
PublisherIEEE
Volume1

Conference

Conference1997 International Conference on Solid-State Sensors and Actuators, TRANSDUCERS 1997
Abbreviated titleTRANSDUCERS 97
CountryUnited States
CityChicago
Period16/06/9719/06/97

Keywords

  • IR-15999
  • METIS-112881
  • EWI-13498

Cite this

Oosterbroek, R. E., Lammerink, T. S. J., Berenschot, J. W., van den Berg, A., & Elwenspoek, M. C. (1997). Designing, realization and characterization of a novel capacitive pressure/flow sensor. In Proceedings of the 1997 International Conference on Solid-State Sensors and Actuators. Part 1 (of 2) (pp. 151-154). Piscataway: IEEE Computer Society. https://doi.org/10.1109/SENSOR.1997.613605
Oosterbroek, R.E. ; Lammerink, Theodorus S.J. ; Berenschot, Johan W. ; van den Berg, Albert ; Elwenspoek, Michael Curt. / Designing, realization and characterization of a novel capacitive pressure/flow sensor. Proceedings of the 1997 International Conference on Solid-State Sensors and Actuators. Part 1 (of 2). Piscataway : IEEE Computer Society, 1997. pp. 151-154
@inproceedings{1883fba22c284f08a8df8e30a9b3b7f9,
title = "Designing, realization and characterization of a novel capacitive pressure/flow sensor",
abstract = "This paper reports the design, realization and characterization results of an integrated pressure / flow sensor for measuring flow-rates as well as pressures of common liquids in micro analysis systems. The sensing system comprises high accurate capacitive pressure sensors and a hydraulic resistor. An attractive feature is the simple realization process consisting of common micromachining techniques.",
keywords = "IR-15999, METIS-112881, EWI-13498",
author = "R.E. Oosterbroek and Lammerink, {Theodorus S.J.} and Berenschot, {Johan W.} and {van den Berg}, Albert and Elwenspoek, {Michael Curt}",
year = "1997",
month = "6",
day = "16",
doi = "10.1109/SENSOR.1997.613605",
language = "Undefined",
isbn = "0-7803-3829-4",
publisher = "IEEE Computer Society",
pages = "151--154",
booktitle = "Proceedings of the 1997 International Conference on Solid-State Sensors and Actuators. Part 1 (of 2)",
address = "United States",

}

Oosterbroek, RE, Lammerink, TSJ, Berenschot, JW, van den Berg, A & Elwenspoek, MC 1997, Designing, realization and characterization of a novel capacitive pressure/flow sensor. in Proceedings of the 1997 International Conference on Solid-State Sensors and Actuators. Part 1 (of 2). IEEE Computer Society, Piscataway, pp. 151-154, 1997 International Conference on Solid-State Sensors and Actuators, TRANSDUCERS 1997, Chicago, United States, 16/06/97. https://doi.org/10.1109/SENSOR.1997.613605

Designing, realization and characterization of a novel capacitive pressure/flow sensor. / Oosterbroek, R.E.; Lammerink, Theodorus S.J.; Berenschot, Johan W.; van den Berg, Albert; Elwenspoek, Michael Curt.

Proceedings of the 1997 International Conference on Solid-State Sensors and Actuators. Part 1 (of 2). Piscataway : IEEE Computer Society, 1997. p. 151-154.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

TY - GEN

T1 - Designing, realization and characterization of a novel capacitive pressure/flow sensor

AU - Oosterbroek, R.E.

AU - Lammerink, Theodorus S.J.

AU - Berenschot, Johan W.

AU - van den Berg, Albert

AU - Elwenspoek, Michael Curt

PY - 1997/6/16

Y1 - 1997/6/16

N2 - This paper reports the design, realization and characterization results of an integrated pressure / flow sensor for measuring flow-rates as well as pressures of common liquids in micro analysis systems. The sensing system comprises high accurate capacitive pressure sensors and a hydraulic resistor. An attractive feature is the simple realization process consisting of common micromachining techniques.

AB - This paper reports the design, realization and characterization results of an integrated pressure / flow sensor for measuring flow-rates as well as pressures of common liquids in micro analysis systems. The sensing system comprises high accurate capacitive pressure sensors and a hydraulic resistor. An attractive feature is the simple realization process consisting of common micromachining techniques.

KW - IR-15999

KW - METIS-112881

KW - EWI-13498

U2 - 10.1109/SENSOR.1997.613605

DO - 10.1109/SENSOR.1997.613605

M3 - Conference contribution

SN - 0-7803-3829-4

SP - 151

EP - 154

BT - Proceedings of the 1997 International Conference on Solid-State Sensors and Actuators. Part 1 (of 2)

PB - IEEE Computer Society

CY - Piscataway

ER -

Oosterbroek RE, Lammerink TSJ, Berenschot JW, van den Berg A, Elwenspoek MC. Designing, realization and characterization of a novel capacitive pressure/flow sensor. In Proceedings of the 1997 International Conference on Solid-State Sensors and Actuators. Part 1 (of 2). Piscataway: IEEE Computer Society. 1997. p. 151-154 https://doi.org/10.1109/SENSOR.1997.613605