Designing, realization and characterization of a novel capacitive pressure/flow sensor

R.E. Oosterbroek, Theodorus S.J. Lammerink, Johan W. Berenschot, Albert van den Berg, Michael Curt Elwenspoek

    Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

    19 Citations (Scopus)
    105 Downloads (Pure)

    Abstract

    This paper reports the design, realization and characterization results of an integrated pressure / flow sensor for measuring flow-rates as well as pressures of common liquids in micro analysis systems. The sensing system comprises high accurate capacitive pressure sensors and a hydraulic resistor. An attractive feature is the simple realization process consisting of common micromachining techniques.
    Original languageUndefined
    Title of host publicationProceedings of the 1997 International Conference on Solid-State Sensors and Actuators. Part 1 (of 2)
    Place of PublicationPiscataway
    PublisherIEEE Computer Society
    Pages151-154
    Number of pages4
    ISBN (Print)0-7803-3829-4
    DOIs
    Publication statusPublished - 16 Jun 1997
    Event1997 International Conference on Solid-State Sensors and Actuators, TRANSDUCERS 1997 - Chicago, United States
    Duration: 16 Jun 199719 Jun 1997

    Publication series

    Name
    PublisherIEEE
    Volume1

    Conference

    Conference1997 International Conference on Solid-State Sensors and Actuators, TRANSDUCERS 1997
    Abbreviated titleTRANSDUCERS 97
    CountryUnited States
    CityChicago
    Period16/06/9719/06/97

    Keywords

    • IR-15999
    • METIS-112881
    • EWI-13498

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