Designing, realization and characterization of a novel capacitive pressure/flow sensor

R.E. Oosterbroek; Theodorus S.J. Lammerink; Johan W. Berenschot; Albert van den Berg; Michael Curt Elwenspoek

doi:10.1109/SENSOR.1997.613605

Designing, realization and characterization of a novel capacitive pressure/flow sensor

R.E. Oosterbroek, Theodorus S.J. Lammerink, Johan W. Berenschot, Albert van den Berg, Michael Curt Elwenspoek

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

21 Citations (Scopus)

172 Downloads (Pure)

Abstract

This paper reports the design, realization and characterization results of an integrated pressure / flow sensor for measuring flow-rates as well as pressures of common liquids in micro analysis systems. The sensing system comprises high accurate capacitive pressure sensors and a hydraulic resistor. An attractive feature is the simple realization process consisting of common micromachining techniques.

Original language	Undefined
Title of host publication	Proceedings of the 1997 International Conference on Solid-State Sensors and Actuators. Part 1 (of 2)
Place of Publication	Piscataway
Publisher	IEEE Computer Society
Pages	151-154
Number of pages	4
ISBN (Print)	0-7803-3829-4
DOIs	https://doi.org/10.1109/SENSOR.1997.613605
Publication status	Published - 16 Jun 1997
Event	1997 International Conference on Solid-State Sensors and Actuators, TRANSDUCERS 1997 - Chicago, United States Duration: 16 Jun 1997 → 19 Jun 1997

Publication series

Name
Publisher	IEEE
Volume	1

Conference

Conference	1997 International Conference on Solid-State Sensors and Actuators, TRANSDUCERS 1997
Abbreviated title	TRANSDUCERS 97
Country/Territory	United States
City	Chicago
Period	16/06/97 → 19/06/97

Keywords

IR-15999
METIS-112881
EWI-13498

Access to Document

10.1109/SENSOR.1997.613605

Cite this

Oosterbroek, R. E., Lammerink, T. S. J., Berenschot, J. W., van den Berg, A., & Elwenspoek, M. C. (1997). Designing, realization and characterization of a novel capacitive pressure/flow sensor. In Proceedings of the 1997 International Conference on Solid-State Sensors and Actuators. Part 1 (of 2) (pp. 151-154). IEEE Computer Society. https://doi.org/10.1109/SENSOR.1997.613605

@inproceedings{1883fba22c284f08a8df8e30a9b3b7f9,

title = "Designing, realization and characterization of a novel capacitive pressure/flow sensor",

abstract = "This paper reports the design, realization and characterization results of an integrated pressure / flow sensor for measuring flow-rates as well as pressures of common liquids in micro analysis systems. The sensing system comprises high accurate capacitive pressure sensors and a hydraulic resistor. An attractive feature is the simple realization process consisting of common micromachining techniques.",

keywords = "IR-15999, METIS-112881, EWI-13498",

author = "R.E. Oosterbroek and Lammerink, {Theodorus S.J.} and Berenschot, {Johan W.} and {van den Berg}, Albert and Elwenspoek, {Michael Curt}",

year = "1997",

month = jun,

day = "16",

doi = "10.1109/SENSOR.1997.613605",

language = "Undefined",

isbn = "0-7803-3829-4",

publisher = "IEEE Computer Society",

pages = "151--154",

booktitle = "Proceedings of the 1997 International Conference on Solid-State Sensors and Actuators. Part 1 (of 2)",

address = "United States",

note = "null ; Conference date: 16-06-1997 Through 19-06-1997",

}

Oosterbroek, RE, Lammerink, TSJ , Berenschot, JW , van den Berg, A & Elwenspoek, MC 1997, Designing, realization and characterization of a novel capacitive pressure/flow sensor. in Proceedings of the 1997 International Conference on Solid-State Sensors and Actuators. Part 1 (of 2). IEEE Computer Society, Piscataway, pp. 151-154, 1997 International Conference on Solid-State Sensors and Actuators, TRANSDUCERS 1997, Chicago, Illinois, United States, 16/06/97. https://doi.org/10.1109/SENSOR.1997.613605

Designing, realization and characterization of a novel capacitive pressure/flow sensor. / Oosterbroek, R.E.; Lammerink, Theodorus S.J.; Berenschot, Johan W. et al.

Proceedings of the 1997 International Conference on Solid-State Sensors and Actuators. Part 1 (of 2). Piscataway : IEEE Computer Society, 1997. p. 151-154.

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

TY - GEN

T1 - Designing, realization and characterization of a novel capacitive pressure/flow sensor

AU - Oosterbroek, R.E.

AU - Lammerink, Theodorus S.J.

AU - Berenschot, Johan W.

AU - van den Berg, Albert

AU - Elwenspoek, Michael Curt

PY - 1997/6/16

Y1 - 1997/6/16

N2 - This paper reports the design, realization and characterization results of an integrated pressure / flow sensor for measuring flow-rates as well as pressures of common liquids in micro analysis systems. The sensing system comprises high accurate capacitive pressure sensors and a hydraulic resistor. An attractive feature is the simple realization process consisting of common micromachining techniques.

AB - This paper reports the design, realization and characterization results of an integrated pressure / flow sensor for measuring flow-rates as well as pressures of common liquids in micro analysis systems. The sensing system comprises high accurate capacitive pressure sensors and a hydraulic resistor. An attractive feature is the simple realization process consisting of common micromachining techniques.

KW - IR-15999

KW - METIS-112881

KW - EWI-13498

U2 - 10.1109/SENSOR.1997.613605

DO - 10.1109/SENSOR.1997.613605

M3 - Conference contribution

SN - 0-7803-3829-4

SP - 151

EP - 154

BT - Proceedings of the 1997 International Conference on Solid-State Sensors and Actuators. Part 1 (of 2)

PB - IEEE Computer Society

CY - Piscataway

Y2 - 16 June 1997 through 19 June 1997

ER -