Designing, simulation and realization of in-plane operating micro-valves, using new etching techniques

    Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

    Original languageUndefined
    Title of host publicationProceedings of the Micromechanics Europe 1998 Conference (MME)
    Place of PublicationUlvik, Norway
    Pages104-107
    Publication statusPublished - 3 Jun 1998
    Event9th Micromechanics Europe Workshop, MME 1998 - Ulvik, Norway
    Duration: 3 Jun 19985 Jun 1998
    Conference number: 9

    Conference

    Conference9th Micromechanics Europe Workshop, MME 1998
    Abbreviated titleMME
    CountryNorway
    CityUlvik
    Period3/06/985/06/98

    Keywords

    • METIS-112902
    • IR-16020

    Cite this

    Oosterbroek, R. E., Berenschot, J. W., Schlautmann, S., Lammerink, T. S. J., van den Berg, A., & Elwenspoek, M. C. (1998). Designing, simulation and realization of in-plane operating micro-valves, using new etching techniques. In Proceedings of the Micromechanics Europe 1998 Conference (MME) (pp. 104-107). Ulvik, Norway.