Designing, simulation and realization of in-plane operating micro-valves, using new etching techniques

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

Original languageUndefined
Title of host publicationProceedings of the Micromechanics Europe 1998 Conference (MME)
Place of PublicationUlvik, Norway
Pages104-107
Publication statusPublished - 3 Jun 1998
Event9th Micromechanics Europe Workshop, MME 1998 - Ulvik, Norway
Duration: 3 Jun 19985 Jun 1998
Conference number: 9

Conference

Conference9th Micromechanics Europe Workshop, MME 1998
Abbreviated titleMME
CountryNorway
CityUlvik
Period3/06/985/06/98

Keywords

  • METIS-112902
  • IR-16020

Cite this

@inproceedings{1af05c81f573424a929b38548e22fd01,
title = "Designing, simulation and realization of in-plane operating micro-valves, using new etching techniques",
keywords = "METIS-112902, IR-16020",
author = "R.E. Oosterbroek and Berenschot, {Johan W.} and Stefan Schlautmann and Lammerink, {Theodorus S.J.} and {van den Berg}, Albert and Elwenspoek, {Michael Curt}",
year = "1998",
month = "6",
day = "3",
language = "Undefined",
pages = "104--107",
booktitle = "Proceedings of the Micromechanics Europe 1998 Conference (MME)",

}

Oosterbroek, RE, Berenschot, JW, Schlautmann, S, Lammerink, TSJ, van den Berg, A & Elwenspoek, MC 1998, Designing, simulation and realization of in-plane operating micro-valves, using new etching techniques. in Proceedings of the Micromechanics Europe 1998 Conference (MME). Ulvik, Norway, pp. 104-107, 9th Micromechanics Europe Workshop, MME 1998, Ulvik, Norway, 3/06/98.

Designing, simulation and realization of in-plane operating micro-valves, using new etching techniques. / Oosterbroek, R.E.; Berenschot, Johan W.; Schlautmann, Stefan; Lammerink, Theodorus S.J.; van den Berg, Albert; Elwenspoek, Michael Curt.

Proceedings of the Micromechanics Europe 1998 Conference (MME). Ulvik, Norway, 1998. p. 104-107.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

TY - GEN

T1 - Designing, simulation and realization of in-plane operating micro-valves, using new etching techniques

AU - Oosterbroek, R.E.

AU - Berenschot, Johan W.

AU - Schlautmann, Stefan

AU - Lammerink, Theodorus S.J.

AU - van den Berg, Albert

AU - Elwenspoek, Michael Curt

PY - 1998/6/3

Y1 - 1998/6/3

KW - METIS-112902

KW - IR-16020

M3 - Conference contribution

SP - 104

EP - 107

BT - Proceedings of the Micromechanics Europe 1998 Conference (MME)

CY - Ulvik, Norway

ER -