Designing, simulation and realization of in-plane operating micro-valves, using new etching techniques

R.E. Oosterbroek; Johan W. Berenschot; Stefan Schlautmann; Theodorus S.J. Lammerink; Albert van den Berg; Michael Curt Elwenspoek

Designing, simulation and realization of in-plane operating micro-valves, using new etching techniques

R.E. Oosterbroek
, Johan W. Berenschot
, Stefan Schlautmann
, Theodorus S.J. Lammerink
, Albert van den Berg
, Michael Curt Elwenspoek

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

Abstract

Design, simulation, fabrication and measurement results of a new method to fabricate in-plane oriented micro valves with use of an-isotropic wet chemical etching techniques are reported. The method is very engaging due to the simplicity, low demands on cleanroom resources, high accurate controllability and wafer-thickness independence. Integration in micro systems is facilitated by the unique possibility to obtain in-plane working devices. Performed analytical and numerical simulations as well as measurements of a duckbill valve demonstrate the functionality.

Original language	Undefined
Title of host publication	Modelling and simulation of microsystems, semiconductors, sensors and actuators
Place of Publication	Santa Clara, USA
Pages	-
Number of pages	3
Publication status	Published - 6 Apr 1998
Event	First International Conference on Modeling and Simulation of Microsystems, Semiconductors, Sensors and Actuators, MSM'98 - Santa Clara, CA, USA Duration: 6 Apr 1998 → 8 Apr 1998

Conference

Conference	First International Conference on Modeling and Simulation of Microsystems, Semiconductors, Sensors and Actuators, MSM'98
Period	6/04/98 → 8/04/98
Other	6-8 April, 1998

Keywords

METIS-112874
IR-15992

Cite this

@inproceedings{8367b0938f124050b22b2d071370ed47,

title = "Designing, simulation and realization of in-plane operating micro-valves, using new etching techniques",

abstract = "Design, simulation, fabrication and measurement results of a new method to fabricate in-plane oriented micro valves with use of an-isotropic wet chemical etching techniques are reported. The method is very engaging due to the simplicity, low demands on cleanroom resources, high accurate controllability and wafer-thickness independence. Integration in micro systems is facilitated by the unique possibility to obtain in-plane working devices. Performed analytical and numerical simulations as well as measurements of a duckbill valve demonstrate the functionality.",

keywords = "METIS-112874, IR-15992",

author = "R.E. Oosterbroek and Berenschot, \{Johan W.\} and Stefan Schlautmann and Lammerink, \{Theodorus S.J.\} and \{van den Berg\}, Albert and Elwenspoek, \{Michael Curt\}",

year = "1998",

month = apr,

day = "6",

language = "Undefined",

pages = "--",

booktitle = "Modelling and simulation of microsystems, semiconductors, sensors and actuators",

note = "First International Conference on Modeling and Simulation of Microsystems, Semiconductors, Sensors and Actuators, MSM\'98 ; Conference date: 06-04-1998 Through 08-04-1998",

}

Oosterbroek, RE, Berenschot, JW , Schlautmann, S, Lammerink, TSJ, van den Berg, A & Elwenspoek, MC 1998, Designing, simulation and realization of in-plane operating micro-valves, using new etching techniques. in Modelling and simulation of microsystems, semiconductors, sensors and actuators. Santa Clara, USA, pp. -, First International Conference on Modeling and Simulation of Microsystems, Semiconductors, Sensors and Actuators, MSM'98, 6/04/98.

Designing, simulation and realization of in-plane operating micro-valves, using new etching techniques. / Oosterbroek, R.E.; Berenschot, Johan W.; Schlautmann, Stefan et al.
Modelling and simulation of microsystems, semiconductors, sensors and actuators. Santa Clara, USA, 1998. p. -.

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

TY - GEN

T1 - Designing, simulation and realization of in-plane operating micro-valves, using new etching techniques

AU - Oosterbroek, R.E.

AU - Berenschot, Johan W.

AU - Schlautmann, Stefan

AU - Lammerink, Theodorus S.J.

AU - van den Berg, Albert

AU - Elwenspoek, Michael Curt

PY - 1998/4/6

Y1 - 1998/4/6

N2 - Design, simulation, fabrication and measurement results of a new method to fabricate in-plane oriented micro valves with use of an-isotropic wet chemical etching techniques are reported. The method is very engaging due to the simplicity, low demands on cleanroom resources, high accurate controllability and wafer-thickness independence. Integration in micro systems is facilitated by the unique possibility to obtain in-plane working devices. Performed analytical and numerical simulations as well as measurements of a duckbill valve demonstrate the functionality.

AB - Design, simulation, fabrication and measurement results of a new method to fabricate in-plane oriented micro valves with use of an-isotropic wet chemical etching techniques are reported. The method is very engaging due to the simplicity, low demands on cleanroom resources, high accurate controllability and wafer-thickness independence. Integration in micro systems is facilitated by the unique possibility to obtain in-plane working devices. Performed analytical and numerical simulations as well as measurements of a duckbill valve demonstrate the functionality.

KW - METIS-112874

KW - IR-15992

M3 - Conference contribution

SP - -

BT - Modelling and simulation of microsystems, semiconductors, sensors and actuators

CY - Santa Clara, USA

T2 - First International Conference on Modeling and Simulation of Microsystems, Semiconductors, Sensors and Actuators, MSM'98

Y2 - 6 April 1998 through 8 April 1998

ER -