Designing, simulation and realization of in-plane operating micro valves, using new etching techniques

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    Design, simulation, fabrication and measurement results of a new method to fabricate in-plane oriented micro valves with use of an-isotropic wet chemical etching techniques are reported. The method is very engaging due to the simplicity, low demands on cleanroom resources, high accurate controllability and wafer-thickness independence. Integration in micro systems is facilitated by the unique possibility to obtain in-plane working devices. Performed analytical and numerical simulations as well as measurements of a duckbill valve demonstrate the functionality.
    Original languageUndefined
    Pages (from-to)194-198
    Number of pages5
    JournalJournal of micromechanics and microengineering
    Issue number2
    Publication statusPublished - Jun 1999


    • METIS-111696
    • IR-14608
    • EWI-13220

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