Designing, simulation and realization of in-plane operating micro valves, using new etching techniques

  • 9 Citations

Abstract

Design, simulation, fabrication and measurement results of a new method to fabricate in-plane oriented micro valves with use of an-isotropic wet chemical etching techniques are reported. The method is very engaging due to the simplicity, low demands on cleanroom resources, high accurate controllability and wafer-thickness independence. Integration in micro systems is facilitated by the unique possibility to obtain in-plane working devices. Performed analytical and numerical simulations as well as measurements of a duckbill valve demonstrate the functionality.
Original languageUndefined
Pages (from-to)194-198
Number of pages5
JournalJournal of micromechanics and microengineering
Volume9
Issue number2
DOIs
StatePublished - Jun 1999

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Wet etching
Controllability
Fabrication
Computer simulation

Keywords

  • METIS-111696
  • IR-14608
  • EWI-13220

Cite this

@article{9df94f77c71147808b27aed2c1fc32bc,
title = "Designing, simulation and realization of in-plane operating micro valves, using new etching techniques",
abstract = "Design, simulation, fabrication and measurement results of a new method to fabricate in-plane oriented micro valves with use of an-isotropic wet chemical etching techniques are reported. The method is very engaging due to the simplicity, low demands on cleanroom resources, high accurate controllability and wafer-thickness independence. Integration in micro systems is facilitated by the unique possibility to obtain in-plane working devices. Performed analytical and numerical simulations as well as measurements of a duckbill valve demonstrate the functionality.",
keywords = "METIS-111696, IR-14608, EWI-13220",
author = "R.E. Oosterbroek and Berenschot, {Johan W.} and Stefan Schlautmann and Krijnen, {Gijsbertus J.M.} and Lammerink, {Theodorus S.J.} and Elwenspoek, {Michael Curt} and {van den Berg}, Albert",
year = "1999",
month = "6",
doi = "10.1088/0960-1317/9/2/322",
volume = "9",
pages = "194--198",
journal = "Journal of micromechanics and microengineering",
issn = "0960-1317",
publisher = "IOP Publishing Ltd.",
number = "2",

}

TY - JOUR

T1 - Designing, simulation and realization of in-plane operating micro valves, using new etching techniques

AU - Oosterbroek,R.E.

AU - Berenschot,Johan W.

AU - Schlautmann,Stefan

AU - Krijnen,Gijsbertus J.M.

AU - Lammerink,Theodorus S.J.

AU - Elwenspoek,Michael Curt

AU - van den Berg,Albert

PY - 1999/6

Y1 - 1999/6

N2 - Design, simulation, fabrication and measurement results of a new method to fabricate in-plane oriented micro valves with use of an-isotropic wet chemical etching techniques are reported. The method is very engaging due to the simplicity, low demands on cleanroom resources, high accurate controllability and wafer-thickness independence. Integration in micro systems is facilitated by the unique possibility to obtain in-plane working devices. Performed analytical and numerical simulations as well as measurements of a duckbill valve demonstrate the functionality.

AB - Design, simulation, fabrication and measurement results of a new method to fabricate in-plane oriented micro valves with use of an-isotropic wet chemical etching techniques are reported. The method is very engaging due to the simplicity, low demands on cleanroom resources, high accurate controllability and wafer-thickness independence. Integration in micro systems is facilitated by the unique possibility to obtain in-plane working devices. Performed analytical and numerical simulations as well as measurements of a duckbill valve demonstrate the functionality.

KW - METIS-111696

KW - IR-14608

KW - EWI-13220

U2 - 10.1088/0960-1317/9/2/322

DO - 10.1088/0960-1317/9/2/322

M3 - Article

VL - 9

SP - 194

EP - 198

JO - Journal of micromechanics and microengineering

T2 - Journal of micromechanics and microengineering

JF - Journal of micromechanics and microengineering

SN - 0960-1317

IS - 2

ER -