TY - JOUR
T1 - Designing, simulation and realization of in-plane operating micro valves, using new etching techniques
AU - Oosterbroek, R.E.
AU - Berenschot, Johan W.
AU - Schlautmann, Stefan
AU - Krijnen, Gijsbertus J.M.
AU - Lammerink, Theodorus S.J.
AU - Elwenspoek, Michael Curt
AU - van den Berg, Albert
PY - 1999/6
Y1 - 1999/6
N2 - Design, simulation, fabrication and measurement results of a new method to fabricate in-plane oriented micro valves with use of an-isotropic wet chemical etching techniques are reported. The method is very engaging due to the simplicity, low demands on cleanroom resources, high accurate controllability and wafer-thickness independence. Integration in micro systems is facilitated by the unique possibility to obtain in-plane working devices. Performed analytical and numerical simulations as well as measurements of a duckbill valve demonstrate the functionality.
AB - Design, simulation, fabrication and measurement results of a new method to fabricate in-plane oriented micro valves with use of an-isotropic wet chemical etching techniques are reported. The method is very engaging due to the simplicity, low demands on cleanroom resources, high accurate controllability and wafer-thickness independence. Integration in micro systems is facilitated by the unique possibility to obtain in-plane working devices. Performed analytical and numerical simulations as well as measurements of a duckbill valve demonstrate the functionality.
KW - METIS-111696
KW - IR-14608
KW - EWI-13220
U2 - 10.1088/0960-1317/9/2/322
DO - 10.1088/0960-1317/9/2/322
M3 - Article
SN - 0960-1317
VL - 9
SP - 194
EP - 198
JO - Journal of micromechanics and microengineering
JF - Journal of micromechanics and microengineering
IS - 2
ER -
