Design, simulation, fabrication and measurement results of a new method to fabricate in-plane oriented micro valves with use of an-isotropic wet chemical etching techniques are reported. The method is very engaging due to the simplicity, low demands on cleanroom resources, high accurate controllability and wafer-thickness independence. Integration in micro systems is facilitated by the unique possibility to obtain in-plane working devices. Performed analytical and numerical simulations as well as measurements of a duckbill valve demonstrate the functionality.
Oosterbroek, R. E., Berenschot, J. W., Schlautmann, S., Krijnen, G. J. M., Lammerink, T. S. J., Elwenspoek, M. C., & van den Berg, A. (1999). Designing, simulation and realization of in-plane operating micro valves, using new etching techniques. Journal of micromechanics and microengineering, 9(2), 194-198. https://doi.org/10.1088/0960-1317/9/2/322