Designing, simulation and realization of in-plane operating micro valves, using new etching techniques

R.E. Oosterbroek, Johan W. Berenschot, Stefan Schlautmann, Gijsbertus J.M. Krijnen, Theodorus S.J. Lammerink, Michael Curt Elwenspoek, Albert van den Berg

    Research output: Contribution to journal › Article › Academic › peer-review

    10 Citations (Scopus)
    8 Downloads (Pure)

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