Designing, simulation and realization of in-plane orienting micro-valves using new etching techniques

    Research output: Other contributionOther research output

    Original languageUndefined
    Place of PublicationEnschede
    Publication statusPublished - 23 Jun 1998

    Keywords

    • METIS-114638

    Cite this

    @misc{841ec0e1e5ca4e798cb25e28b93c3d4d,
    title = "Designing, simulation and realization of in-plane orienting micro-valves using new etching techniques",
    keywords = "METIS-114638",
    author = "R.E. Oosterbroek and Berenschot, {Johan W.} and Stefan Schlautmann and Lammerink, {Theodorus S.J.} and {van den Berg}, Albert and Elwenspoek, {Michael Curt}",
    year = "1998",
    month = "6",
    day = "23",
    language = "Undefined",
    type = "Other",

    }

    TY - GEN

    T1 - Designing, simulation and realization of in-plane orienting micro-valves using new etching techniques

    AU - Oosterbroek, R.E.

    AU - Berenschot, Johan W.

    AU - Schlautmann, Stefan

    AU - Lammerink, Theodorus S.J.

    AU - van den Berg, Albert

    AU - Elwenspoek, Michael Curt

    PY - 1998/6/23

    Y1 - 1998/6/23

    KW - METIS-114638

    M3 - Other contribution

    CY - Enschede

    ER -