Designing, simulation and realization of in-plane orienting micro-valves using new etching techniques

R.E. Oosterbroek; Johan W. Berenschot; Stefan Schlautmann; Theodorus S.J. Lammerink; Albert van den Berg; Michael Curt Elwenspoek

Designing, simulation and realization of in-plane orienting micro-valves using new etching techniques

R.E. Oosterbroek
, Johan W. Berenschot
, Stefan Schlautmann
, Theodorus S.J. Lammerink
, Albert van den Berg
, Michael Curt Elwenspoek

Research output: Other contribution › Other research output

Original language	Undefined
Place of Publication	Enschede
Publication status	Published - 23 Jun 1998

Keywords

METIS-114638

Cite this

@misc{841ec0e1e5ca4e798cb25e28b93c3d4d,

title = "Designing, simulation and realization of in-plane orienting micro-valves using new etching techniques",

keywords = "METIS-114638",

author = "R.E. Oosterbroek and Berenschot, \{Johan W.\} and Stefan Schlautmann and Lammerink, \{Theodorus S.J.\} and \{van den Berg\}, Albert and Elwenspoek, \{Michael Curt\}",

year = "1998",

month = jun,

day = "23",

language = "Undefined",

type = "Other",

}