Determination of Optimal 3D Micromachining Parameters of Hole Area Modulation (HAM) Method (P544)

K.H. Choi, J. Meijer, T. Masuzawa, S.S. Kim

    Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

    Original languageUndefined
    Title of host publicationProceedings of the ICALEO'03 Laser Micro Febrication Section E (cd-rom)
    Place of PublicationJacksonville (FL) USA
    PublisherLIA
    Pages170-178
    ISBN (Print)0-912035-75-7
    Publication statusPublished - 13 Oct 2003
    Event22nd International Congress on Applications of Lasers & Electro-Optics, ICALEO 2003 - Jacksonville, United States
    Duration: 13 Oct 200316 Oct 2003
    Conference number: 22

    Conference

    Conference22nd International Congress on Applications of Lasers & Electro-Optics, ICALEO 2003
    Abbreviated titleICALEO
    CountryUnited States
    CityJacksonville
    Period13/10/0316/10/03

    Keywords

    • METIS-212447

    Cite this

    Choi, K. H., Meijer, J., Masuzawa, T., & Kim, S. S. (2003). Determination of Optimal 3D Micromachining Parameters of Hole Area Modulation (HAM) Method (P544). In Proceedings of the ICALEO'03 Laser Micro Febrication Section E (cd-rom) (pp. 170-178). Jacksonville (FL) USA: LIA.
    Choi, K.H. ; Meijer, J. ; Masuzawa, T. ; Kim, S.S. / Determination of Optimal 3D Micromachining Parameters of Hole Area Modulation (HAM) Method (P544). Proceedings of the ICALEO'03 Laser Micro Febrication Section E (cd-rom). Jacksonville (FL) USA : LIA, 2003. pp. 170-178
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    title = "Determination of Optimal 3D Micromachining Parameters of Hole Area Modulation (HAM) Method (P544)",
    keywords = "METIS-212447",
    author = "K.H. Choi and J. Meijer and T. Masuzawa and S.S. Kim",
    year = "2003",
    month = "10",
    day = "13",
    language = "Undefined",
    isbn = "0-912035-75-7",
    pages = "170--178",
    booktitle = "Proceedings of the ICALEO'03 Laser Micro Febrication Section E (cd-rom)",
    publisher = "LIA",

    }

    Choi, KH, Meijer, J, Masuzawa, T & Kim, SS 2003, Determination of Optimal 3D Micromachining Parameters of Hole Area Modulation (HAM) Method (P544). in Proceedings of the ICALEO'03 Laser Micro Febrication Section E (cd-rom). LIA, Jacksonville (FL) USA, pp. 170-178, 22nd International Congress on Applications of Lasers & Electro-Optics, ICALEO 2003, Jacksonville, United States, 13/10/03.

    Determination of Optimal 3D Micromachining Parameters of Hole Area Modulation (HAM) Method (P544). / Choi, K.H.; Meijer, J.; Masuzawa, T.; Kim, S.S.

    Proceedings of the ICALEO'03 Laser Micro Febrication Section E (cd-rom). Jacksonville (FL) USA : LIA, 2003. p. 170-178.

    Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

    TY - GEN

    T1 - Determination of Optimal 3D Micromachining Parameters of Hole Area Modulation (HAM) Method (P544)

    AU - Choi, K.H.

    AU - Meijer, J.

    AU - Masuzawa, T.

    AU - Kim, S.S.

    PY - 2003/10/13

    Y1 - 2003/10/13

    KW - METIS-212447

    M3 - Conference contribution

    SN - 0-912035-75-7

    SP - 170

    EP - 178

    BT - Proceedings of the ICALEO'03 Laser Micro Febrication Section E (cd-rom)

    PB - LIA

    CY - Jacksonville (FL) USA

    ER -

    Choi KH, Meijer J, Masuzawa T, Kim SS. Determination of Optimal 3D Micromachining Parameters of Hole Area Modulation (HAM) Method (P544). In Proceedings of the ICALEO'03 Laser Micro Febrication Section E (cd-rom). Jacksonville (FL) USA: LIA. 2003. p. 170-178