Original language | Undefined |
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Title of host publication | Proceedings of the ICALEO'03 Laser Micro Febrication Section E (cd-rom) |
Place of Publication | Jacksonville (FL) USA |
Publisher | LIA |
Pages | 170-178 |
ISBN (Print) | 0-912035-75-7 |
Publication status | Published - 13 Oct 2003 |
Event | 22nd International Congress on Applications of Lasers & Electro-Optics, ICALEO 2003 - Jacksonville, United States Duration: 13 Oct 2003 → 16 Oct 2003 Conference number: 22 |
Conference
Conference | 22nd International Congress on Applications of Lasers & Electro-Optics, ICALEO 2003 |
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Abbreviated title | ICALEO |
Country/Territory | United States |
City | Jacksonville |
Period | 13/10/03 → 16/10/03 |
Keywords
- METIS-212447