Determination of Optimal 3D Micromachining Parameters of Hole Area Modulation (HAM) Method (P544)

K.H. Choi, J. Meijer, T. Masuzawa, S.S. Kim

    Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

    Original languageUndefined
    Title of host publicationProceedings of the ICALEO'03 Laser Micro Febrication Section E (cd-rom)
    Place of PublicationJacksonville (FL) USA
    PublisherLIA
    Pages170-178
    ISBN (Print)0-912035-75-7
    Publication statusPublished - 13 Oct 2003
    Event22nd International Congress on Applications of Lasers & Electro-Optics, ICALEO 2003 - Jacksonville, United States
    Duration: 13 Oct 200316 Oct 2003
    Conference number: 22

    Conference

    Conference22nd International Congress on Applications of Lasers & Electro-Optics, ICALEO 2003
    Abbreviated titleICALEO
    CountryUnited States
    CityJacksonville
    Period13/10/0316/10/03

    Keywords

    • METIS-212447

    Cite this

    Choi, K. H., Meijer, J., Masuzawa, T., & Kim, S. S. (2003). Determination of Optimal 3D Micromachining Parameters of Hole Area Modulation (HAM) Method (P544). In Proceedings of the ICALEO'03 Laser Micro Febrication Section E (cd-rom) (pp. 170-178). Jacksonville (FL) USA: LIA.