Determination of Optimal 3D Micromachining Parameters of Hole Area Modulation (HAM) Method (P544)

K.H. Choi; J. Meijer; T. Masuzawa; S.S. Kim

Determination of Optimal 3D Micromachining Parameters of Hole Area Modulation (HAM) Method (P544)

K.H. Choi, J. Meijer, T. Masuzawa, S.S. Kim

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

Original language	Undefined
Title of host publication	Proceedings of the ICALEO'03 Laser Micro Febrication Section E (cd-rom)
Place of Publication	Jacksonville (FL) USA
Publisher	LIA
Pages	170-178
ISBN (Print)	0-912035-75-7
Publication status	Published - 13 Oct 2003
Event	22nd International Congress on Applications of Lasers & Electro-Optics, ICALEO 2003 - Jacksonville, United States Duration: 13 Oct 2003 → 16 Oct 2003 Conference number: 22

Conference

Conference	22nd International Congress on Applications of Lasers & Electro-Optics, ICALEO 2003
Abbreviated title	ICALEO
Country/Territory	United States
City	Jacksonville
Period	13/10/03 → 16/10/03

Keywords

METIS-212447

UN SDGs

This output contributes to the following UN Sustainable Development Goals (SDGs)

Cite this

@inproceedings{6b094be7cda544458e780d91a92701bc,

title = "Determination of Optimal 3D Micromachining Parameters of Hole Area Modulation (HAM) Method (P544)",

keywords = "METIS-212447",

author = "K.H. Choi and J. Meijer and T. Masuzawa and S.S. Kim",

year = "2003",

month = oct,

day = "13",

language = "Undefined",

isbn = "0-912035-75-7",

pages = "170--178",

booktitle = "Proceedings of the ICALEO'03 Laser Micro Febrication Section E (cd-rom)",

publisher = "LIA",

note = "22nd International Congress on Applications of Lasers \& Electro-Optics, ICALEO 2003 ; Conference date: 13-10-2003 Through 16-10-2003",

}

Choi, KH, Meijer, J, Masuzawa, T & Kim, SS 2003, Determination of Optimal 3D Micromachining Parameters of Hole Area Modulation (HAM) Method (P544). in Proceedings of the ICALEO'03 Laser Micro Febrication Section E (cd-rom). LIA, Jacksonville (FL) USA, pp. 170-178, 22nd International Congress on Applications of Lasers & Electro-Optics, ICALEO 2003, Jacksonville, Florida, United States, 13/10/03.

Determination of Optimal 3D Micromachining Parameters of Hole Area Modulation (HAM) Method (P544). / Choi, K.H.; Meijer, J.; Masuzawa, T. et al.
Proceedings of the ICALEO'03 Laser Micro Febrication Section E (cd-rom). Jacksonville (FL) USA: LIA, 2003. p. 170-178.

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

TY - GEN

T1 - Determination of Optimal 3D Micromachining Parameters of Hole Area Modulation (HAM) Method (P544)

AU - Choi, K.H.

AU - Meijer, J.

AU - Masuzawa, T.

AU - Kim, S.S.

N1 - Conference code: 22

PY - 2003/10/13

Y1 - 2003/10/13

KW - METIS-212447

M3 - Conference contribution

SN - 0-912035-75-7

SP - 170

EP - 178

BT - Proceedings of the ICALEO'03 Laser Micro Febrication Section E (cd-rom)

PB - LIA

CY - Jacksonville (FL) USA

T2 - 22nd International Congress on Applications of Lasers & Electro-Optics, ICALEO 2003

Y2 - 13 October 2003 through 16 October 2003

ER -