Determination of the density of ultrathin films using X-ray standing waves

Research output: Other contributionOther research output

Abstract

Determination of density of ultrathin films presents a basic challenge for the research of multilayer structures. The commonly used technique of grazing incidence X-ray reflectivity analysis does not provide unique solutions for the layers thinner than 10 nm. Solution to this problem was proposed and explored by measuring the fluorescence yield angular dependence from a thin marker layer, placed above the layer to be characterized. Using simultaneous analysis of grazing incidence X-ray reflectivity and angular dependent fluoresce yields from specially designed and fabricated structures, densities of thin La and LaN layers of 2-6 nm thicknesses have been obtained with approximately 5% precision.
Original languageEnglish
Place of PublicationVeldhoven, Netherlands
Publication statusPublished - 2011

Fingerprint

standing waves
grazing incidence
x rays
reflectance
markers
laminates
fluorescence

Keywords

  • METIS-304956

Cite this

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title = "Determination of the density of ultrathin films using X-ray standing waves",
abstract = "Determination of density of ultrathin films presents a basic challenge for the research of multilayer structures. The commonly used technique of grazing incidence X-ray reflectivity analysis does not provide unique solutions for the layers thinner than 10 nm. Solution to this problem was proposed and explored by measuring the fluorescence yield angular dependence from a thin marker layer, placed above the layer to be characterized. Using simultaneous analysis of grazing incidence X-ray reflectivity and angular dependent fluoresce yields from specially designed and fabricated structures, densities of thin La and LaN layers of 2-6 nm thicknesses have been obtained with approximately 5{\%} precision.",
keywords = "METIS-304956",
author = "Makhotkin, {Igor Alexandrovich}",
year = "2011",
language = "English",
type = "Other",

}

Determination of the density of ultrathin films using X-ray standing waves. / Makhotkin, Igor Alexandrovich.

Veldhoven, Netherlands. 2011, .

Research output: Other contributionOther research output

TY - GEN

T1 - Determination of the density of ultrathin films using X-ray standing waves

AU - Makhotkin, Igor Alexandrovich

PY - 2011

Y1 - 2011

N2 - Determination of density of ultrathin films presents a basic challenge for the research of multilayer structures. The commonly used technique of grazing incidence X-ray reflectivity analysis does not provide unique solutions for the layers thinner than 10 nm. Solution to this problem was proposed and explored by measuring the fluorescence yield angular dependence from a thin marker layer, placed above the layer to be characterized. Using simultaneous analysis of grazing incidence X-ray reflectivity and angular dependent fluoresce yields from specially designed and fabricated structures, densities of thin La and LaN layers of 2-6 nm thicknesses have been obtained with approximately 5% precision.

AB - Determination of density of ultrathin films presents a basic challenge for the research of multilayer structures. The commonly used technique of grazing incidence X-ray reflectivity analysis does not provide unique solutions for the layers thinner than 10 nm. Solution to this problem was proposed and explored by measuring the fluorescence yield angular dependence from a thin marker layer, placed above the layer to be characterized. Using simultaneous analysis of grazing incidence X-ray reflectivity and angular dependent fluoresce yields from specially designed and fabricated structures, densities of thin La and LaN layers of 2-6 nm thicknesses have been obtained with approximately 5% precision.

KW - METIS-304956

M3 - Other contribution

CY - Veldhoven, Netherlands

ER -