Determination of the Sensitivity Behaviour of an Acoustic and Thermal Flow Sensor by Electronic Characterisation

J.W. van Honschoten; Vitaly Svetovoy; Theodorus S.J. Lammerink; Gijsbertus J.M. Krijnen; Michael Curt Elwenspoek

doi:10.1109/ICSENS.2002.1037305

Determination of the Sensitivity Behaviour of an Acoustic and Thermal Flow Sensor by Electronic Characterisation

J.W. van Honschoten, Vitaly Svetovoy, Theodorus S.J. Lammerink, Gijsbertus J.M. Krijnen, Michael Curt Elwenspoek

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

1 Citation (Scopus)

182 Downloads (Pure)

Abstract

The Microflown is an acoustic and thermal flow sensor that measures the sound particle velocity instead of sound pressure. For most applications the Microflown should be calibrated, which is usually performed acoustically in a standing-wave-tube. Here it is shown that the sensor's sensitivity and frequency behaviour can be determined electronically as well, and an electronic method for determination of the device output response, which is more convenient, is therefore presented. The method is not only less complicated, it also makes it possible to cover easily the entire acoustic frequency spectrum

Original language	Undefined
Title of host publication	Proceedings of the First IEEE International Conference on Sensors - IEEE Sensors 2002
Place of Publication	Piscataway
Publisher	IEEE
Pages	1298-1303
Number of pages	6
ISBN (Print)	0-7803-7454-1
DOIs	https://doi.org/10.1109/ICSENS.2002.1037305
Publication status	Published - 12 Jun 2002
Event	1st IEEE International Conference on Sensors, IEEE Sensors 2002 - Hyatt Orlando Hotel, Orlando, United States Duration: 12 Jun 2002 → 14 Jun 2002 Conference number: 1 http://ewh.ieee.org/conf/sensors2002/

Publication series

Name
Publisher	IEEE
Volume	2

Conference

Conference	1st IEEE International Conference on Sensors, IEEE Sensors 2002
Abbreviated title	IEEE Sensors 2002
Country/Territory	United States
City	Orlando
Period	12/06/02 → 14/06/02
Internet address	http://ewh.ieee.org/conf/sensors2002/

Keywords

METIS-206400
IR-43353
EWI-12697

Access to Document

10.1109/ICSENS.2002.1037305

Cite this

van Honschoten, J. W., Svetovoy, V., Lammerink, T. S. J., Krijnen, G. J. M., & Elwenspoek, M. C. (2002). Determination of the Sensitivity Behaviour of an Acoustic and Thermal Flow Sensor by Electronic Characterisation. In Proceedings of the First IEEE International Conference on Sensors - IEEE Sensors 2002 (pp. 1298-1303). IEEE. https://doi.org/10.1109/ICSENS.2002.1037305

@inproceedings{21e731dedb704ec1bb1f30dea7b80a28,

title = "Determination of the Sensitivity Behaviour of an Acoustic and Thermal Flow Sensor by Electronic Characterisation",

abstract = "The Microflown is an acoustic and thermal flow sensor that measures the sound particle velocity instead of sound pressure. For most applications the Microflown should be calibrated, which is usually performed acoustically in a standing-wave-tube. Here it is shown that the sensor's sensitivity and frequency behaviour can be determined electronically as well, and an electronic method for determination of the device output response, which is more convenient, is therefore presented. The method is not only less complicated, it also makes it possible to cover easily the entire acoustic frequency spectrum",

keywords = "METIS-206400, IR-43353, EWI-12697",

author = "{van Honschoten}, J.W. and Vitaly Svetovoy and Lammerink, {Theodorus S.J.} and Krijnen, {Gijsbertus J.M.} and Elwenspoek, {Michael Curt}",

note = "Poster ; 1st IEEE International Conference on Sensors, IEEE Sensors 2002 ; Conference date: 12-06-2002 Through 14-06-2002",

year = "2002",

month = jun,

day = "12",

doi = "10.1109/ICSENS.2002.1037305",

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publisher = "IEEE",

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booktitle = "Proceedings of the First IEEE International Conference on Sensors - IEEE Sensors 2002",

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van Honschoten, JW, Svetovoy, V, Lammerink, TSJ, Krijnen, GJM & Elwenspoek, MC 2002, Determination of the Sensitivity Behaviour of an Acoustic and Thermal Flow Sensor by Electronic Characterisation. in Proceedings of the First IEEE International Conference on Sensors - IEEE Sensors 2002. IEEE, Piscataway, pp. 1298-1303, 1st IEEE International Conference on Sensors, IEEE Sensors 2002, Orlando, Florida, United States, 12/06/02. https://doi.org/10.1109/ICSENS.2002.1037305

Determination of the Sensitivity Behaviour of an Acoustic and Thermal Flow Sensor by Electronic Characterisation. / van Honschoten, J.W.; Svetovoy, Vitaly; Lammerink, Theodorus S.J. et al.
Proceedings of the First IEEE International Conference on Sensors - IEEE Sensors 2002. Piscataway: IEEE, 2002. p. 1298-1303.

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

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