Determination of the Sensitivity Behaviour of an Acoustic and Thermal Flow Sensor by Electronic Characterisation

J.W. van Honschoten, Vitaly Svetovoy, Theodorus S.J. Lammerink, Gijsbertus J.M. Krijnen, Michael Curt Elwenspoek

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    Abstract

    The Microflown is an acoustic and thermal flow sensor that measures the sound particle velocity instead of sound pressure. For most applications the Microflown should be calibrated, which is usually performed acoustically in a standing-wave-tube. Here it is shown that the sensor's sensitivity and frequency behaviour can be determined electronically as well, and an electronic method for determination of the device output response, which is more convenient, is therefore presented. The method is not only less complicated, it also makes it possible to cover easily the entire acoustic frequency spectrum
    Original languageUndefined
    Title of host publicationProceedings of the First IEEE International Conference on Sensors - IEEE Sensors 2002
    Place of PublicationPiscataway
    PublisherIEEE
    Pages1298-1303
    Number of pages6
    ISBN (Print)0-7803-7454-1
    DOIs
    Publication statusPublished - 12 Jun 2002
    Event1st IEEE International Conference on Sensors, IEEE Sensors 2002 - Hyatt Orlando Hotel, Orlando, United States
    Duration: 12 Jun 200214 Jun 2002
    Conference number: 1
    http://ewh.ieee.org/conf/sensors2002/

    Publication series

    Name
    PublisherIEEE
    Volume2

    Conference

    Conference1st IEEE International Conference on Sensors, IEEE Sensors 2002
    Abbreviated titleIEEE Sensors 2002
    CountryUnited States
    CityOrlando
    Period12/06/0214/06/02
    Internet address

    Keywords

    • METIS-206400
    • IR-43353
    • EWI-12697

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