Determination of young's modulus of PZT and CO80Ni20 thin films by means of micromachined cantilevers

H. Nazeer; Leon Abelmann; Niels Roelof Tas; J.W. van Honschoten; Martin Herman Siekman; Michael Curt Elwenspoek

Determination of young's modulus of PZT and CO₈₀Ni₂₀ thin films by means of micromachined cantilevers

H. Nazeer, Leon Abelmann, Niels Roelof Tas, J.W. van Honschoten, Martin Herman Siekman, Michael Curt Elwenspoek

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic

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Abstract

This paper presents a technique to determine the Young’s modulus and residual stress of thin films using a simple micromachined silicon cantilever as the test structure. An analytical relation was developed based on the shift in resonance frequency caused by the addition of a thin film on the cantilever. FEM simulations were performed which confirmed the validity of assumptions made in our analytical model. Resonance frequency measurements both before and after the deposition of the thin film improve the accuracy of the results. Experiments were performed on PZT deposited by pulsed laser deposition and on evaporated Co80Ni20 thin films.

Original language	Undefined
Title of host publication	Proceedings of the 20th Micromechanics Europe Workshop
Place of Publication	Toulouse
Publisher	LAAS-CNRS
Pages	278-281
Number of pages	4
ISBN (Print)	not assigned
Publication status	Published - 2009
Event	20th Micromechanics Europe Workshop, MME 2009 - Toulouse, France Duration: 21 Sep 2009 → 23 Sep 2009 Conference number: 20

Publication series

Name
Publisher	LAAS-CNRS

Conference

Conference	20th Micromechanics Europe Workshop, MME 2009
Abbreviated title	MME
Country	France
City	Toulouse
Period	21/09/09 → 23/09/09

Keywords

METIS-264014
Cantilever
IR-68054
CoNi
EWI-16040
Resonance frequency
Young’s modulus
TST-SMI: Formerly in EWI-SMI
TST-uSPAM: micro Scanning Probe Array Memory
PZT

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Cite this

@inproceedings{d5ac9db2e8cb4e99bdef9daf325ad525,

title = "Determination of young's modulus of PZT and CO80Ni20 thin films by means of micromachined cantilevers",

abstract = "This paper presents a technique to determine the Young{\textquoteright}s modulus and residual stress of thin films using a simple micromachined silicon cantilever as the test structure. An analytical relation was developed based on the shift in resonance frequency caused by the addition of a thin film on the cantilever. FEM simulations were performed which confirmed the validity of assumptions made in our analytical model. Resonance frequency measurements both before and after the deposition of the thin film improve the accuracy of the results. Experiments were performed on PZT deposited by pulsed laser deposition and on evaporated Co80Ni20 thin films.",

keywords = "METIS-264014, Cantilever, IR-68054, CoNi, EWI-16040, Resonance frequency, Young{\textquoteright}s modulus, TST-SMI: Formerly in EWI-SMI, TST-uSPAM: micro Scanning Probe Array Memory, PZT",

author = "H. Nazeer and Leon Abelmann and Tas, {Niels Roelof} and {van Honschoten}, J.W. and Siekman, {Martin Herman} and Elwenspoek, {Michael Curt}",

note = "http://www.mme2009.org/proceedings/Proceedings-final-complet.pdf; null ; Conference date: 21-09-2009 Through 23-09-2009",

year = "2009",

language = "Undefined",

isbn = "not assigned",

publisher = "LAAS-CNRS",

pages = "278--281",

booktitle = "Proceedings of the 20th Micromechanics Europe Workshop",

}

Determination of young's modulus of PZT and CO₈₀Ni₂₀ thin films by means of micromachined cantilevers. / Nazeer, H.; Abelmann, Leon ; Tas, Niels Roelof; van Honschoten, J.W.; Siekman, Martin Herman; Elwenspoek, Michael Curt.

Proceedings of the 20th Micromechanics Europe Workshop. Toulouse : LAAS-CNRS, 2009. p. 278-281.

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic

TY - GEN

T1 - Determination of young's modulus of PZT and CO80Ni20 thin films by means of micromachined cantilevers

AU - Nazeer, H.

AU - Abelmann, Leon

AU - Tas, Niels Roelof

AU - van Honschoten, J.W.

AU - Siekman, Martin Herman

AU - Elwenspoek, Michael Curt

N1 - Conference code: 20

PY - 2009

Y1 - 2009

N2 - This paper presents a technique to determine the Young’s modulus and residual stress of thin films using a simple micromachined silicon cantilever as the test structure. An analytical relation was developed based on the shift in resonance frequency caused by the addition of a thin film on the cantilever. FEM simulations were performed which confirmed the validity of assumptions made in our analytical model. Resonance frequency measurements both before and after the deposition of the thin film improve the accuracy of the results. Experiments were performed on PZT deposited by pulsed laser deposition and on evaporated Co80Ni20 thin films.

AB - This paper presents a technique to determine the Young’s modulus and residual stress of thin films using a simple micromachined silicon cantilever as the test structure. An analytical relation was developed based on the shift in resonance frequency caused by the addition of a thin film on the cantilever. FEM simulations were performed which confirmed the validity of assumptions made in our analytical model. Resonance frequency measurements both before and after the deposition of the thin film improve the accuracy of the results. Experiments were performed on PZT deposited by pulsed laser deposition and on evaporated Co80Ni20 thin films.

KW - METIS-264014

KW - Cantilever

KW - IR-68054

KW - CoNi

KW - EWI-16040

KW - Resonance frequency

KW - Young’s modulus

KW - TST-SMI: Formerly in EWI-SMI

KW - TST-uSPAM: micro Scanning Probe Array Memory

KW - PZT

M3 - Conference contribution

SN - not assigned

SP - 278

EP - 281

BT - Proceedings of the 20th Micromechanics Europe Workshop

PB - LAAS-CNRS

CY - Toulouse

Y2 - 21 September 2009 through 23 September 2009

ER -