Abstract
| Original language | Undefined |
|---|---|
| Title of host publication | Proceedings of the 20th Micromechanics Europe Workshop |
| Place of Publication | Toulouse |
| Publisher | LAAS-CNRS |
| Pages | 278-281 |
| Number of pages | 4 |
| ISBN (Print) | not assigned |
| Publication status | Published - 2009 |
| Event | 20th Micromechanics Europe Workshop, MME 2009 - Toulouse, France Duration: 21 Sep 2009 → 23 Sep 2009 Conference number: 20 |
Publication series
| Name | |
|---|---|
| Publisher | LAAS-CNRS |
Conference
| Conference | 20th Micromechanics Europe Workshop, MME 2009 |
|---|---|
| Abbreviated title | MME |
| Country | France |
| City | Toulouse |
| Period | 21/09/09 → 23/09/09 |
Keywords
- METIS-264014
- Cantilever
- IR-68054
- CoNi
- EWI-16040
- Resonance frequency
- Young’s modulus
- TST-SMI: Formerly in EWI-SMI
- TST-uSPAM: micro Scanning Probe Array Memory
- PZT
Cite this
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Determination of young's modulus of PZT and CO80Ni20 thin films by means of micromachined cantilevers. / Nazeer, H.; Abelmann, Leon; Tas, Niels Roelof; van Honschoten, J.W.; Siekman, Martin Herman; Elwenspoek, Michael Curt.
Proceedings of the 20th Micromechanics Europe Workshop. Toulouse : LAAS-CNRS, 2009. p. 278-281.Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic
TY - GEN
T1 - Determination of young's modulus of PZT and CO80Ni20 thin films by means of micromachined cantilevers
AU - Nazeer, H.
AU - Abelmann, Leon
AU - Tas, Niels Roelof
AU - van Honschoten, J.W.
AU - Siekman, Martin Herman
AU - Elwenspoek, Michael Curt
N1 - http://www.mme2009.org/proceedings/Proceedings-final-complet.pdf
PY - 2009
Y1 - 2009
N2 - This paper presents a technique to determine the Young’s modulus and residual stress of thin films using a simple micromachined silicon cantilever as the test structure. An analytical relation was developed based on the shift in resonance frequency caused by the addition of a thin film on the cantilever. FEM simulations were performed which confirmed the validity of assumptions made in our analytical model. Resonance frequency measurements both before and after the deposition of the thin film improve the accuracy of the results. Experiments were performed on PZT deposited by pulsed laser deposition and on evaporated Co80Ni20 thin films.
AB - This paper presents a technique to determine the Young’s modulus and residual stress of thin films using a simple micromachined silicon cantilever as the test structure. An analytical relation was developed based on the shift in resonance frequency caused by the addition of a thin film on the cantilever. FEM simulations were performed which confirmed the validity of assumptions made in our analytical model. Resonance frequency measurements both before and after the deposition of the thin film improve the accuracy of the results. Experiments were performed on PZT deposited by pulsed laser deposition and on evaporated Co80Ni20 thin films.
KW - METIS-264014
KW - Cantilever
KW - IR-68054
KW - CoNi
KW - EWI-16040
KW - Resonance frequency
KW - Young’s modulus
KW - TST-SMI: Formerly in EWI-SMI
KW - TST-uSPAM: micro Scanning Probe Array Memory
KW - PZT
M3 - Conference contribution
SN - not assigned
SP - 278
EP - 281
BT - Proceedings of the 20th Micromechanics Europe Workshop
PB - LAAS-CNRS
CY - Toulouse
ER -