Determination of young's modulus of PZT and CO80Ni20 thin films by means of micromachined cantilevers

H. Nazeer, Leon Abelmann, Niels Roelof Tas, J.W. van Honschoten, Martin Herman Siekman, Michael Curt Elwenspoek

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    Abstract

    This paper presents a technique to determine the Young’s modulus and residual stress of thin films using a simple micromachined silicon cantilever as the test structure. An analytical relation was developed based on the shift in resonance frequency caused by the addition of a thin film on the cantilever. FEM simulations were performed which confirmed the validity of assumptions made in our analytical model. Resonance frequency measurements both before and after the deposition of the thin film improve the accuracy of the results. Experiments were performed on PZT deposited by pulsed laser deposition and on evaporated Co80Ni20 thin films.
    Original languageUndefined
    Title of host publicationProceedings of the 20th Micromechanics Europe Workshop
    Place of PublicationToulouse
    PublisherLAAS-CNRS
    Pages278-281
    Number of pages4
    ISBN (Print)not assigned
    Publication statusPublished - 2009
    Event20th Micromechanics Europe Workshop, MME 2009 - Toulouse, France
    Duration: 21 Sep 200923 Sep 2009
    Conference number: 20

    Publication series

    Name
    PublisherLAAS-CNRS

    Conference

    Conference20th Micromechanics Europe Workshop, MME 2009
    Abbreviated titleMME
    CountryFrance
    CityToulouse
    Period21/09/0923/09/09

    Keywords

    • METIS-264014
    • Cantilever
    • IR-68054
    • CoNi
    • EWI-16040
    • Resonance frequency
    • Young’s modulus
    • TST-SMI: Formerly in EWI-SMI
    • TST-uSPAM: micro Scanning Probe Array Memory
    • PZT

    Cite this

    Nazeer, H., Abelmann, L., Tas, N. R., van Honschoten, J. W., Siekman, M. H., & Elwenspoek, M. C. (2009). Determination of young's modulus of PZT and CO80Ni20 thin films by means of micromachined cantilevers. In Proceedings of the 20th Micromechanics Europe Workshop (pp. 278-281). Toulouse: LAAS-CNRS.