Determination of young's modulus of PZT and CO80Ni20 thin films by means of micromachined cantilevers

H. Nazeer, Leon Abelmann, Niels Roelof Tas, J.W. van Honschoten, Martin Herman Siekman, Michael Curt Elwenspoek

    Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic

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