Determination of young's modulus of PZT-influence of cantilever orientation

H. Nazeer, L.A. Woldering, Leon Abelmann, Michael Curt Elwenspoek

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    Abstract

    Calculation of the resonance frequency of cantilevers fabricated from an elastically anisotropic material requires the use of an effective Young’s modulus. In this paper a technique to determine the appropriate effective Young’s modulus for arbitrary cantilever geometries is introduced. This technique is validated using a combined analytical and finite element simulations (FEM) approach. In addition, the effective Young’s modulus of PbZr0.52Ti0.48O3 (PZT) thin films deposited on dedicated micromachined cantilevers was investigated experimentally. The PZT films were deposited on the cantilevers by pulsed laser deposition (PLD). The change in flexural resonance frequency of the cantilevers was measured both before and after deposition of the PZT thin film. From this frequency difference we determined the Young’s modulus of PZT deposited by PLD to be 103 ± 2 GPa. Even though the PZT is grown epitaxially, this value is independent of the in-plane orientation.
    Original languageUndefined
    Title of host publicationProceedings of the 21st Micromechanics and Micro systems Europe workshop (MME 2010)
    Place of PublicationEnschede
    PublisherUniversity of Twente - Transducers Science and Technology (TST)
    Pages257-260
    Number of pages4
    ISBN (Print)978-90-81673716
    Publication statusPublished - Sep 2010
    Event21st Micromechanics and Microsystems Europe Workshop, MME 2010 - University of Twente, Enschede, Netherlands
    Duration: 26 Sep 201029 Sep 2010
    Conference number: 21

    Publication series

    Name
    PublisherUniversity of Twente, Transducers Science and Technology (TST)

    Workshop

    Workshop21st Micromechanics and Microsystems Europe Workshop, MME 2010
    Abbreviated titleMME
    CountryNetherlands
    CityEnschede
    Period26/09/1029/09/10

    Keywords

    • IR-74826
    • METIS-276158
    • Cantilever
    • PLD
    • PZT
    • TST-SMI: Formerly in EWI-SMI
    • Young’s modulus
    • anisotropic
    • FEM
    • EWI-18877
    • TST-uSPAM: micro Scanning Probe Array Memory
    • Resonance frequency

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