Determination of young's modulus of PZT-influence of cantilever orientation

H. Nazeer, L.A. Woldering, Leon Abelmann, Michael Curt Elwenspoek

    Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

    49 Downloads (Pure)


    Calculation of the resonance frequency of cantilevers fabricated from an elastically anisotropic material requires the use of an effective Young’s modulus. In this paper a technique to determine the appropriate effective Young’s modulus for arbitrary cantilever geometries is introduced. This technique is validated using a combined analytical and finite element simulations (FEM) approach. In addition, the effective Young’s modulus of PbZr0.52Ti0.48O3 (PZT) thin films deposited on dedicated micromachined cantilevers was investigated experimentally. The PZT films were deposited on the cantilevers by pulsed laser deposition (PLD). The change in flexural resonance frequency of the cantilevers was measured both before and after deposition of the PZT thin film. From this frequency difference we determined the Young’s modulus of PZT deposited by PLD to be 103 ± 2 GPa. Even though the PZT is grown epitaxially, this value is independent of the in-plane orientation.
    Original languageUndefined
    Title of host publicationProceedings of the 21st Micromechanics and Micro systems Europe workshop (MME 2010)
    Place of PublicationEnschede
    PublisherUniversity of Twente - Transducers Science and Technology (TST)
    Number of pages4
    ISBN (Print)978-90-81673716
    Publication statusPublished - Sept 2010
    Event21st Micromechanics and Microsystems Europe Workshop, MME 2010 - University of Twente, Enschede, Netherlands
    Duration: 26 Sept 201029 Sept 2010
    Conference number: 21

    Publication series

    PublisherUniversity of Twente, Transducers Science and Technology (TST)


    Workshop21st Micromechanics and Microsystems Europe Workshop, MME 2010
    Abbreviated titleMME


    • IR-74826
    • METIS-276158
    • Cantilever
    • PLD
    • PZT
    • TST-SMI: Formerly in EWI-SMI
    • Young’s modulus
    • anisotropic
    • FEM
    • EWI-18877
    • TST-uSPAM: micro Scanning Probe Array Memory
    • Resonance frequency

    Cite this