Determination of young's modulus of PZT-influence of cantilever orientation

H. Nazeer; L.A. Woldering; Leon Abelmann; Michael Curt Elwenspoek

Determination of young's modulus of PZT-influence of cantilever orientation

H. Nazeer, L.A. Woldering, Leon Abelmann, Michael Curt Elwenspoek

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

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Abstract

Calculation of the resonance frequency of cantilevers fabricated from an elastically anisotropic material requires the use of an effective Young’s modulus. In this paper a technique to determine the appropriate effective Young’s modulus for arbitrary cantilever geometries is introduced. This technique is validated using a combined analytical and finite element simulations (FEM) approach. In addition, the effective Young’s modulus of PbZr0.52Ti0.48O3 (PZT) thin films deposited on dedicated micromachined cantilevers was investigated experimentally. The PZT films were deposited on the cantilevers by pulsed laser deposition (PLD). The change in flexural resonance frequency of the cantilevers was measured both before and after deposition of the PZT thin film. From this frequency difference we determined the Young’s modulus of PZT deposited by PLD to be 103 ± 2 GPa. Even though the PZT is grown epitaxially, this value is independent of the in-plane orientation.

Original language	Undefined
Title of host publication	Proceedings of the 21st Micromechanics and Micro systems Europe workshop (MME 2010)
Place of Publication	Enschede
Publisher	University of Twente - Transducers Science and Technology (TST)
Pages	257-260
Number of pages	4
ISBN (Print)	978-90-81673716
Publication status	Published - Sept 2010
Event	21st Micromechanics and Microsystems Europe Workshop, MME 2010 - University of Twente, Enschede, Netherlands Duration: 26 Sept 2010 → 29 Sept 2010 Conference number: 21

Publication series

Name
Publisher	University of Twente, Transducers Science and Technology (TST)

Workshop

Workshop	21st Micromechanics and Microsystems Europe Workshop, MME 2010
Abbreviated title	MME
Country/Territory	Netherlands
City	Enschede
Period	26/09/10 → 29/09/10

Keywords

IR-74826
METIS-276158
Cantilever
PLD
PZT
TST-SMI: Formerly in EWI-SMI
Young’s modulus
anisotropic
FEM
EWI-18877
TST-uSPAM: micro Scanning Probe Array Memory
Resonance frequency

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Cite this

@inproceedings{a9a4fcc3856d4a4eb4dd45bc9bd3a6f6,

title = "Determination of young's modulus of PZT-influence of cantilever orientation",

abstract = "Calculation of the resonance frequency of cantilevers fabricated from an elastically anisotropic material requires the use of an effective Young{\textquoteright}s modulus. In this paper a technique to determine the appropriate effective Young{\textquoteright}s modulus for arbitrary cantilever geometries is introduced. This technique is validated using a combined analytical and finite element simulations (FEM) approach. In addition, the effective Young{\textquoteright}s modulus of PbZr0.52Ti0.48O3 (PZT) thin films deposited on dedicated micromachined cantilevers was investigated experimentally. The PZT films were deposited on the cantilevers by pulsed laser deposition (PLD). The change in flexural resonance frequency of the cantilevers was measured both before and after deposition of the PZT thin film. From this frequency difference we determined the Young{\textquoteright}s modulus of PZT deposited by PLD to be 103 ± 2 GPa. Even though the PZT is grown epitaxially, this value is independent of the in-plane orientation.",

keywords = "IR-74826, METIS-276158, Cantilever, PLD, PZT, TST-SMI: Formerly in EWI-SMI, Young{\textquoteright}s modulus, anisotropic, FEM, EWI-18877, TST-uSPAM: micro Scanning Probe Array Memory, Resonance frequency",

author = "H. Nazeer and L.A. Woldering and Leon Abelmann and Elwenspoek, {Michael Curt}",

year = "2010",

month = sep,

language = "Undefined",

isbn = "978-90-81673716",

publisher = "University of Twente - Transducers Science and Technology (TST)",

pages = "257--260",

booktitle = "Proceedings of the 21st Micromechanics and Micro systems Europe workshop (MME 2010)",

note = "21st Micromechanics and Microsystems Europe Workshop, MME 2010 ; Conference date: 26-09-2010 Through 29-09-2010",

}

Nazeer, H, Woldering, LA, Abelmann, L & Elwenspoek, MC 2010, Determination of young's modulus of PZT-influence of cantilever orientation. in Proceedings of the 21st Micromechanics and Micro systems Europe workshop (MME 2010). University of Twente - Transducers Science and Technology (TST), Enschede, pp. 257-260, 21st Micromechanics and Microsystems Europe Workshop, MME 2010, Enschede, Netherlands, 26/09/10.

Determination of young's modulus of PZT-influence of cantilever orientation. / Nazeer, H.; Woldering, L.A.; Abelmann, Leon et al.
Proceedings of the 21st Micromechanics and Micro systems Europe workshop (MME 2010). Enschede: University of Twente - Transducers Science and Technology (TST), 2010. p. 257-260.

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

TY - GEN

T1 - Determination of young's modulus of PZT-influence of cantilever orientation

AU - Nazeer, H.

AU - Woldering, L.A.

AU - Abelmann, Leon

AU - Elwenspoek, Michael Curt

N1 - Conference code: 21

PY - 2010/9

Y1 - 2010/9

N2 - Calculation of the resonance frequency of cantilevers fabricated from an elastically anisotropic material requires the use of an effective Young’s modulus. In this paper a technique to determine the appropriate effective Young’s modulus for arbitrary cantilever geometries is introduced. This technique is validated using a combined analytical and finite element simulations (FEM) approach. In addition, the effective Young’s modulus of PbZr0.52Ti0.48O3 (PZT) thin films deposited on dedicated micromachined cantilevers was investigated experimentally. The PZT films were deposited on the cantilevers by pulsed laser deposition (PLD). The change in flexural resonance frequency of the cantilevers was measured both before and after deposition of the PZT thin film. From this frequency difference we determined the Young’s modulus of PZT deposited by PLD to be 103 ± 2 GPa. Even though the PZT is grown epitaxially, this value is independent of the in-plane orientation.

AB - Calculation of the resonance frequency of cantilevers fabricated from an elastically anisotropic material requires the use of an effective Young’s modulus. In this paper a technique to determine the appropriate effective Young’s modulus for arbitrary cantilever geometries is introduced. This technique is validated using a combined analytical and finite element simulations (FEM) approach. In addition, the effective Young’s modulus of PbZr0.52Ti0.48O3 (PZT) thin films deposited on dedicated micromachined cantilevers was investigated experimentally. The PZT films were deposited on the cantilevers by pulsed laser deposition (PLD). The change in flexural resonance frequency of the cantilevers was measured both before and after deposition of the PZT thin film. From this frequency difference we determined the Young’s modulus of PZT deposited by PLD to be 103 ± 2 GPa. Even though the PZT is grown epitaxially, this value is independent of the in-plane orientation.

KW - IR-74826

KW - METIS-276158

KW - Cantilever

KW - PLD

KW - PZT

KW - TST-SMI: Formerly in EWI-SMI

KW - Young’s modulus

KW - anisotropic

KW - FEM

KW - EWI-18877

KW - TST-uSPAM: micro Scanning Probe Array Memory

KW - Resonance frequency

M3 - Conference contribution

SN - 978-90-81673716

SP - 257

EP - 260

BT - Proceedings of the 21st Micromechanics and Micro systems Europe workshop (MME 2010)

PB - University of Twente - Transducers Science and Technology (TST)

CY - Enschede

T2 - 21st Micromechanics and Microsystems Europe Workshop, MME 2010

Y2 - 26 September 2010 through 29 September 2010

ER -