Developing multilayer coatings, an enabling component of advanced chip manufacturing using Extreme Ultraviolet Lithography

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

Original languageUndefined
Title of host publicationOsterreichische Tribologische Gesellshaft (OTG) and Technische Akademie Esslingen (TAE)
Pages88-90
Publication statusPublished - 14 Mar 2007

Keywords

  • METIS-239298

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