Developing multilayer coatings, an enabling component of advanced chip manufacturing using Extreme Ultraviolet Lithography

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

Original language	Undefined
Title of host publication	Osterreichische Tribologische Gesellshaft (OTG) and Technische Akademie Esslingen (TAE)
Pages	88-90
Publication status	Published - 14 Mar 2007

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This output contributes to the following UN Sustainable Development Goals (SDGs)

@inproceedings{958ca3dbadb24e25b68123db0ef7524e,

title = "Developing multilayer coatings, an enabling component of advanced chip manufacturing using Extreme Ultraviolet Lithography",

keywords = "METIS-239298",

author = "Frederik Bijkerk and Eric Louis",

year = "2007",

month = mar,

day = "14",

language = "Undefined",

pages = "88--90",

booktitle = "Osterreichische Tribologische Gesellshaft (OTG) and Technische Akademie Esslingen (TAE)",

}

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review