Development and Fabrication of Capacitive Sensors in Polyimide

M. Pedersen, Wouter Olthuis, Piet Bergveld

    Research output: Contribution to journalArticleAcademicpeer-review

    6 Citations (Scopus)
    Original languageUndefined
    Pages (from-to)1-20
    Number of pages20
    JournalSensors and materials
    Volume10
    Issue number1
    Publication statusPublished - 1998

    Keywords

    • METIS-111979

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