Development and Fabrication of Capacitive Sensors in Polyimide

M. Pedersen, Wouter Olthuis, Piet Bergveld

Research output: Contribution to journalArticleAcademicpeer-review

6 Citations (Scopus)
Original languageUndefined
Pages (from-to)1-20
Number of pages20
JournalSensors and materials
Volume10
Issue number1
Publication statusPublished - 1998

Keywords

  • METIS-111979

Cite this

Pedersen, M. ; Olthuis, Wouter ; Bergveld, Piet. / Development and Fabrication of Capacitive Sensors in Polyimide. In: Sensors and materials. 1998 ; Vol. 10, No. 1. pp. 1-20.
@article{36a6a32b552043879fd98a773f056fd6,
title = "Development and Fabrication of Capacitive Sensors in Polyimide",
keywords = "METIS-111979",
author = "M. Pedersen and Wouter Olthuis and Piet Bergveld",
year = "1998",
language = "Undefined",
volume = "10",
pages = "1--20",
journal = "Sensors and materials",
issn = "0914-4935",
publisher = "M Y U Scientific Publishing Division",
number = "1",

}

Development and Fabrication of Capacitive Sensors in Polyimide. / Pedersen, M.; Olthuis, Wouter; Bergveld, Piet.

In: Sensors and materials, Vol. 10, No. 1, 1998, p. 1-20.

Research output: Contribution to journalArticleAcademicpeer-review

TY - JOUR

T1 - Development and Fabrication of Capacitive Sensors in Polyimide

AU - Pedersen, M.

AU - Olthuis, Wouter

AU - Bergveld, Piet

PY - 1998

Y1 - 1998

KW - METIS-111979

M3 - Article

VL - 10

SP - 1

EP - 20

JO - Sensors and materials

JF - Sensors and materials

SN - 0914-4935

IS - 1

ER -