Development of a Capacitive Mems RF Power Sensor Without Dissipative Losses: Towards a New Philosophy of RF Power Sensing

L.J. Fernandez, Eelke Visser, J. Sesé, Remco J. Wiegerink, Henricus V. Jansen, Jakob Flokstra, Michael Curt Elwenspoek

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The development of a novel radio frequency (RF) power sensor is presented based on capacitive micro electromechanical system (MEMS) technology, in which the signal is barely disturbed during the power measurement. Results of the first prototypes and improvements for the second generation of RF power sensors are given
Original languageUndefined
Number of pages2
Publication statusPublished - 27 Jun 2004
EventConference on Precision Electromagnetic Measurements, 2004 - London, UK
Duration: 27 Jun 20042 Jul 2004


ConferenceConference on Precision Electromagnetic Measurements, 2004
Other27 June - 2 July 2004


  • EWI-19164
  • METIS-219828
  • IR-75347

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