Development of a Capacitive Mems RF Power Sensor Without Dissipative Losses: Towards a New Philosophy of RF Power Sensing

L.J. Fernandez; Eelke Visser; J. Sesé; Remco J. Wiegerink; Henricus V. Jansen; Jakob Flokstra; Michael Curt Elwenspoek

doi:10.1109/CPEM.2004.305488

Development of a Capacitive Mems RF Power Sensor Without Dissipative Losses: Towards a New Philosophy of RF Power Sensing

L.J. Fernandez, Eelke Visser, J. Sesé, Remco J. Wiegerink, Henricus V. Jansen, Jakob Flokstra, Michael Curt Elwenspoek

Faculty of Science and Technology

Research output: Contribution to conference › Paper › peer-review

137 Downloads (Pure)

Abstract

The development of a novel radio frequency (RF) power sensor is presented based on capacitive micro electromechanical system (MEMS) technology, in which the signal is barely disturbed during the power measurement. Results of the first prototypes and improvements for the second generation of RF power sensors are given

Original language	Undefined
Pages	117-118
Number of pages	2
DOIs	https://doi.org/10.1109/CPEM.2004.305488
Publication status	Published - 27 Jun 2004
Event	Conference on Precision Electromagnetic Measurements, 2004 - London, UK Duration: 27 Jun 2004 → 2 Jul 2004

Conference

Conference	Conference on Precision Electromagnetic Measurements, 2004
Period	27/06/04 → 2/07/04
Other	27 June - 2 July 2004

Keywords

EWI-19164
METIS-219828
IR-75347

Access to Document

10.1109/CPEM.2004.305488

Cite this

@conference{360b7e5d27c54b03909b24e4b8b2c30f,

title = "Development of a Capacitive Mems RF Power Sensor Without Dissipative Losses: Towards a New Philosophy of RF Power Sensing",

abstract = "The development of a novel radio frequency (RF) power sensor is presented based on capacitive micro electromechanical system (MEMS) technology, in which the signal is barely disturbed during the power measurement. Results of the first prototypes and improvements for the second generation of RF power sensors are given",

keywords = "EWI-19164, METIS-219828, IR-75347",

author = "L.J. Fernandez and Eelke Visser and J. Ses{\'e} and Wiegerink, {Remco J.} and Jansen, {Henricus V.} and Jakob Flokstra and Elwenspoek, {Michael Curt}",

year = "2004",

month = jun,

day = "27",

doi = "10.1109/CPEM.2004.305488",

language = "Undefined",

pages = "117--118",

note = "null ; Conference date: 27-06-2004 Through 02-07-2004",

}

Fernandez, LJ, Visser, E, Sesé, J, Wiegerink, RJ, Jansen, HV, Flokstra, J & Elwenspoek, MC 2004, 'Development of a Capacitive Mems RF Power Sensor Without Dissipative Losses: Towards a New Philosophy of RF Power Sensing', Paper presented at Conference on Precision Electromagnetic Measurements, 2004, 27/06/04 - 2/07/04 pp. 117-118. https://doi.org/10.1109/CPEM.2004.305488

TY - CONF

T1 - Development of a Capacitive Mems RF Power Sensor Without Dissipative Losses: Towards a New Philosophy of RF Power Sensing

AU - Fernandez, L.J.

AU - Visser, Eelke

AU - Sesé, J.

AU - Wiegerink, Remco J.

AU - Jansen, Henricus V.

AU - Flokstra, Jakob

AU - Elwenspoek, Michael Curt

PY - 2004/6/27

Y1 - 2004/6/27

N2 - The development of a novel radio frequency (RF) power sensor is presented based on capacitive micro electromechanical system (MEMS) technology, in which the signal is barely disturbed during the power measurement. Results of the first prototypes and improvements for the second generation of RF power sensors are given

AB - The development of a novel radio frequency (RF) power sensor is presented based on capacitive micro electromechanical system (MEMS) technology, in which the signal is barely disturbed during the power measurement. Results of the first prototypes and improvements for the second generation of RF power sensors are given

KW - EWI-19164

KW - METIS-219828

KW - IR-75347

U2 - 10.1109/CPEM.2004.305488

DO - 10.1109/CPEM.2004.305488

M3 - Paper

SP - 117

EP - 118

Y2 - 27 June 2004 through 2 July 2004

ER -