Development of a gas microvalve based on fine and micromachining

I. Fazal

    Research output: ThesisPhD Thesis - Research UT, graduation UTAcademic

    35 Downloads (Pure)

    Abstract

    The work presented in this thesis is generated in the frame of the project “Micro and Miniaturized Flow Controller for Gas Chromatography�? financially supported by the Dutch Technology Foundation (STW). The aim of the project is to develop a miniature instrument for the control of gas flow known as flow controller. An important application of the flow controller is gas chromatography. Gas chromatography is a method for separating substances in a mixture and measuring the relative quantities of substances. It is a useful technique for substances that do not decompose at high temperatures and when a very small quantity of sample (micrograms) is available. Since there is a strong trend to miniaturize these systems as small systems use small amounts of materials and smaller samples for analysis, small flow controllers are demanded. Flow controllers are comprised of controllable valves, flow sensors and control electronics. The research subject in this project is directed mainly to miniature valve, which currently forms the bottleneck in the development of the miniature flow controller. In this thesis a new design of a valve is proposed, which has the attractive feature that no power is required to keep the valve at a freely chosen position. To achieve the aforesaid objective to realize a controllable valve with no power consumption to keep the valve at a freely chosen position, a combination of micromachining and conventional fine machining is explored.
    Original languageUndefined
    Awarding Institution
    • University of Twente
    Supervisors/Advisors
    • Elwenspoek, Michael Curt, Supervisor
    • Jansen, Henricus V., Advisor
    • van den Berg, Albert , Advisor
    • Gardeniers, J.G.E., Advisor
    • Enoksson, E.P., Advisor
    • Muller, J., Advisor
    • Zengerle, R., Advisor
    • Lötters, Joost Conrad, Advisor
    Thesis sponsors
    Award date19 Oct 2007
    Place of PublicationEnschede
    Publisher
    Print ISBNs978-90-365-2571-8
    Publication statusPublished - 19 Oct 2007

    Keywords

    • METIS-246024
    • IR-58024
    • EWI-11926

    Cite this

    Fazal, I. (2007). Development of a gas microvalve based on fine and micromachining. Enschede: University of Twente.
    Fazal, I.. / Development of a gas microvalve based on fine and micromachining. Enschede : University of Twente, 2007. 157 p.
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    title = "Development of a gas microvalve based on fine and micromachining",
    abstract = "The work presented in this thesis is generated in the frame of the project {\^a}€œMicro and Miniaturized Flow Controller for Gas Chromatography{\"i}¿½? financially supported by the Dutch Technology Foundation (STW). The aim of the project is to develop a miniature instrument for the control of gas flow known as flow controller. An important application of the flow controller is gas chromatography. Gas chromatography is a method for separating substances in a mixture and measuring the relative quantities of substances. It is a useful technique for substances that do not decompose at high temperatures and when a very small quantity of sample (micrograms) is available. Since there is a strong trend to miniaturize these systems as small systems use small amounts of materials and smaller samples for analysis, small flow controllers are demanded. Flow controllers are comprised of controllable valves, flow sensors and control electronics. The research subject in this project is directed mainly to miniature valve, which currently forms the bottleneck in the development of the miniature flow controller. In this thesis a new design of a valve is proposed, which has the attractive feature that no power is required to keep the valve at a freely chosen position. To achieve the aforesaid objective to realize a controllable valve with no power consumption to keep the valve at a freely chosen position, a combination of micromachining and conventional fine machining is explored.",
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    author = "I. Fazal",
    year = "2007",
    month = "10",
    day = "19",
    language = "Undefined",
    isbn = "978-90-365-2571-8",
    publisher = "University of Twente",
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    Fazal, I 2007, 'Development of a gas microvalve based on fine and micromachining', University of Twente, Enschede.

    Development of a gas microvalve based on fine and micromachining. / Fazal, I.

    Enschede : University of Twente, 2007. 157 p.

    Research output: ThesisPhD Thesis - Research UT, graduation UTAcademic

    TY - THES

    T1 - Development of a gas microvalve based on fine and micromachining

    AU - Fazal, I.

    PY - 2007/10/19

    Y1 - 2007/10/19

    N2 - The work presented in this thesis is generated in the frame of the project “Micro and Miniaturized Flow Controller for Gas Chromatography�? financially supported by the Dutch Technology Foundation (STW). The aim of the project is to develop a miniature instrument for the control of gas flow known as flow controller. An important application of the flow controller is gas chromatography. Gas chromatography is a method for separating substances in a mixture and measuring the relative quantities of substances. It is a useful technique for substances that do not decompose at high temperatures and when a very small quantity of sample (micrograms) is available. Since there is a strong trend to miniaturize these systems as small systems use small amounts of materials and smaller samples for analysis, small flow controllers are demanded. Flow controllers are comprised of controllable valves, flow sensors and control electronics. The research subject in this project is directed mainly to miniature valve, which currently forms the bottleneck in the development of the miniature flow controller. In this thesis a new design of a valve is proposed, which has the attractive feature that no power is required to keep the valve at a freely chosen position. To achieve the aforesaid objective to realize a controllable valve with no power consumption to keep the valve at a freely chosen position, a combination of micromachining and conventional fine machining is explored.

    AB - The work presented in this thesis is generated in the frame of the project “Micro and Miniaturized Flow Controller for Gas Chromatography�? financially supported by the Dutch Technology Foundation (STW). The aim of the project is to develop a miniature instrument for the control of gas flow known as flow controller. An important application of the flow controller is gas chromatography. Gas chromatography is a method for separating substances in a mixture and measuring the relative quantities of substances. It is a useful technique for substances that do not decompose at high temperatures and when a very small quantity of sample (micrograms) is available. Since there is a strong trend to miniaturize these systems as small systems use small amounts of materials and smaller samples for analysis, small flow controllers are demanded. Flow controllers are comprised of controllable valves, flow sensors and control electronics. The research subject in this project is directed mainly to miniature valve, which currently forms the bottleneck in the development of the miniature flow controller. In this thesis a new design of a valve is proposed, which has the attractive feature that no power is required to keep the valve at a freely chosen position. To achieve the aforesaid objective to realize a controllable valve with no power consumption to keep the valve at a freely chosen position, a combination of micromachining and conventional fine machining is explored.

    KW - METIS-246024

    KW - IR-58024

    KW - EWI-11926

    M3 - PhD Thesis - Research UT, graduation UT

    SN - 978-90-365-2571-8

    PB - University of Twente

    CY - Enschede

    ER -

    Fazal I. Development of a gas microvalve based on fine and micromachining. Enschede: University of Twente, 2007. 157 p.