Development of an array of transition edge sensors for application in X-ray astronomy

Marcel P. Bruijn, Norman H.R. Baars, Wouter M. Bergmann Tiest, Alexander Germeau, Henk F.C. Hoevers, Piet A.J. de Korte, Wim A. Mels, Marcel L. Ridder, Eric Krouwer, John J. van Baar, Remco J. Wiegerink

    Research output: Contribution to journalArticleAcademic

    12 Citations (Scopus)

    Abstract

    We report on the development activities towards a cryogenic array of micro-calorimeters, based on voltage-biased Ti/Au transition edge thermometers. Fabrication issues are discussed along the lines of two fabrication routes. One route utilizes bulk micromachining in [1 1 0] Si wafers, the other route surface micromachining with a sacrificial layer. Prototype 5×5 arrays have been fabricated and we present the first performance data: Two arrays were irradiated with 5.9 keV X-ray irradiation and an energy resolution of 6–7 eV FWHM was obtained. The arrays have been designed and their performance is analyzed with the aid of finite element simulation of the electrothermal behavior of a single pixel and thermal conductivity in the supporting structure.
    Original languageEnglish
    Pages (from-to)443-445
    JournalNuclear instruments & methods in physics research. Section A : Accelerators, spectrometers, detectors and associated equipment
    Volume520
    Issue number1-3
    DOIs
    Publication statusPublished - 2004

    Keywords

    • Cryogenic sensor
    • Microcalorimeter
    • Micro machining
    • Imaging array
    • XEUS
    • X-ray detector
    • X-ray astronomy

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