Development of an array of transition edge sensors for application in X-ray astronomy

Marcel P. Bruijn; Norman H.R. Baars; Wouter M. Bergmann Tiest; Alexander Germeau; Henk F.C. Hoevers; Piet A.J. de Korte; Wim A. Mels; Marcel L. Ridder; Eric Krouwer; John J. van Baar; Remco J. Wiegerink

doi:10.1016/j.nima.2003.11.359

Development of an array of transition edge sensors for application in X-ray astronomy

Marcel P. Bruijn, Norman H.R. Baars, Wouter M. Bergmann Tiest, Alexander Germeau, Henk F.C. Hoevers, Piet A.J. de Korte, Wim A. Mels, Marcel L. Ridder, Eric Krouwer, John J. van Baar, Remco J. Wiegerink

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Abstract

We report on the development activities towards a cryogenic array of micro-calorimeters, based on voltage-biased Ti/Au transition edge thermometers. Fabrication issues are discussed along the lines of two fabrication routes. One route utilizes bulk micromachining in [1 1 0] Si wafers, the other route surface micromachining with a sacrificial layer. Prototype 5×5 arrays have been fabricated and we present the first performance data: Two arrays were irradiated with 5.9 keV X-ray irradiation and an energy resolution of 6–7 eV FWHM was obtained. The arrays have been designed and their performance is analyzed with the aid of finite element simulation of the electrothermal behavior of a single pixel and thermal conductivity in the supporting structure.

Original language	English
Pages (from-to)	443-445
Journal	Nuclear instruments & methods in physics research. Section A : Accelerators, spectrometers, detectors and associated equipment
Volume	520
Issue number	1-3
DOIs	https://doi.org/10.1016/j.nima.2003.11.359
Publication status	Published - 2004

Keywords

Cryogenic sensor
Microcalorimeter
Micro machining
Imaging array
XEUS
X-ray detector
X-ray astronomy

UN SDGs

This output contributes to the following UN Sustainable Development Goals (SDGs)

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10.1016/j.nima.2003.11.359

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Bruijn, M. P., Baars, N. H. R., Bergmann Tiest, W. M., Germeau, A., Hoevers, H. F. C., de Korte, P. A. J., Mels, W. A., Ridder, M. L., Krouwer, E., van Baar, J. J., & Wiegerink, R. J. (2004). Development of an array of transition edge sensors for application in X-ray astronomy. Nuclear instruments & methods in physics research. Section A : Accelerators, spectrometers, detectors and associated equipment, 520(1-3), 443-445. https://doi.org/10.1016/j.nima.2003.11.359

@article{e6247c51475a4c948ece15426f2b5bf7,

title = "Development of an array of transition edge sensors for application in X-ray astronomy",

abstract = "We report on the development activities towards a cryogenic array of micro-calorimeters, based on voltage-biased Ti/Au transition edge thermometers. Fabrication issues are discussed along the lines of two fabrication routes. One route utilizes bulk micromachining in [1 1 0] Si wafers, the other route surface micromachining with a sacrificial layer. Prototype 5×5 arrays have been fabricated and we present the first performance data: Two arrays were irradiated with 5.9 keV X-ray irradiation and an energy resolution of 6–7 eV FWHM was obtained. The arrays have been designed and their performance is analyzed with the aid of finite element simulation of the electrothermal behavior of a single pixel and thermal conductivity in the supporting structure.",

keywords = "Cryogenic sensor, Microcalorimeter, Micro machining, Imaging array, XEUS, X-ray detector, X-ray astronomy",

author = "Bruijn, {Marcel P.} and Baars, {Norman H.R.} and {Bergmann Tiest}, {Wouter M.} and Alexander Germeau and Hoevers, {Henk F.C.} and {de Korte}, {Piet A.J.} and Mels, {Wim A.} and Ridder, {Marcel L.} and Eric Krouwer and {van Baar}, {John J.} and Wiegerink, {Remco J.}",

year = "2004",

doi = "10.1016/j.nima.2003.11.359",

language = "English",

volume = "520",

pages = "443--445",

journal = "Nuclear instruments & methods in physics research. Section A : Accelerators, spectrometers, detectors and associated equipment",

issn = "0168-9002",

publisher = "Elsevier B.V.",

number = "1-3",

}

Bruijn, MP, Baars, NHR, Bergmann Tiest, WM, Germeau, A, Hoevers, HFC, de Korte, PAJ, Mels, WA, Ridder, ML, Krouwer, E, van Baar, JJ & Wiegerink, RJ 2004, 'Development of an array of transition edge sensors for application in X-ray astronomy', Nuclear instruments & methods in physics research. Section A : Accelerators, spectrometers, detectors and associated equipment, vol. 520, no. 1-3, pp. 443-445. https://doi.org/10.1016/j.nima.2003.11.359

Development of an array of transition edge sensors for application in X-ray astronomy. / Bruijn, Marcel P.; Baars, Norman H.R.; Bergmann Tiest, Wouter M. et al.
In: Nuclear instruments & methods in physics research. Section A : Accelerators, spectrometers, detectors and associated equipment, Vol. 520, No. 1-3, 2004, p. 443-445.

Research output: Contribution to journal › Article › Academic

TY - JOUR

T1 - Development of an array of transition edge sensors for application in X-ray astronomy

AU - Bruijn, Marcel P.

AU - Baars, Norman H.R.

AU - Bergmann Tiest, Wouter M.

AU - Germeau, Alexander

AU - Hoevers, Henk F.C.

AU - de Korte, Piet A.J.

AU - Mels, Wim A.

AU - Ridder, Marcel L.

AU - Krouwer, Eric

AU - van Baar, John J.

AU - Wiegerink, Remco J.

PY - 2004

Y1 - 2004

N2 - We report on the development activities towards a cryogenic array of micro-calorimeters, based on voltage-biased Ti/Au transition edge thermometers. Fabrication issues are discussed along the lines of two fabrication routes. One route utilizes bulk micromachining in [1 1 0] Si wafers, the other route surface micromachining with a sacrificial layer. Prototype 5×5 arrays have been fabricated and we present the first performance data: Two arrays were irradiated with 5.9 keV X-ray irradiation and an energy resolution of 6–7 eV FWHM was obtained. The arrays have been designed and their performance is analyzed with the aid of finite element simulation of the electrothermal behavior of a single pixel and thermal conductivity in the supporting structure.

AB - We report on the development activities towards a cryogenic array of micro-calorimeters, based on voltage-biased Ti/Au transition edge thermometers. Fabrication issues are discussed along the lines of two fabrication routes. One route utilizes bulk micromachining in [1 1 0] Si wafers, the other route surface micromachining with a sacrificial layer. Prototype 5×5 arrays have been fabricated and we present the first performance data: Two arrays were irradiated with 5.9 keV X-ray irradiation and an energy resolution of 6–7 eV FWHM was obtained. The arrays have been designed and their performance is analyzed with the aid of finite element simulation of the electrothermal behavior of a single pixel and thermal conductivity in the supporting structure.

KW - Cryogenic sensor

KW - Microcalorimeter

KW - Micro machining

KW - Imaging array

KW - XEUS

KW - X-ray detector

KW - X-ray astronomy

U2 - 10.1016/j.nima.2003.11.359

DO - 10.1016/j.nima.2003.11.359

M3 - Article

SN - 0168-9002

VL - 520

SP - 443

EP - 445

JO - Nuclear instruments & methods in physics research. Section A : Accelerators, spectrometers, detectors and associated equipment

JF - Nuclear instruments & methods in physics research. Section A : Accelerators, spectrometers, detectors and associated equipment

IS - 1-3

ER -

Development of an array of transition edge sensors for application in X-ray astronomy

Abstract

Keywords

UN SDGs

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