Development of arrays of transition edge sensors for application in X-ray astronomy

Marcel P. Bruijn, Wouter M. Bergmann Tiest, Henk F.C. Hoevers, Eric Krouwer, Jan van der Kuur, Marcel L. Ridder, Z. Moktadir, Remco J. Wiegerink, Dick van Gelder, Michael Curt Elwenspoek

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    The development of an array of voltage biased superconducting transition edge microcalorimeters is described. This work is directed to an application in future X-ray Astronomy missions, such as Constellation-X (USA) and the X-ray Evolving Universe Spectroscopy Mission (XEUS, Europe). After several years of very successful development of single pixel microcalorimeters (SRON showed a record energy resolution ΔEFWHM = 3.9 eV for 5.9 keV photons, combined with an effective time constant of 150 μs and high X-ray absorption efficiency (94%)) work towards an array of 32 × 32 pixels has started. Aiming at a prototype of 5 × 5 pixels, several options for fabrication, using micromachining techniques are under study, both experimentally and theoretically. Measurement of thermal transport in detector support structures at sub-Kelvin temperatures indicates ballistic phonon transport. The detector development is accompanied by finite element modeling.
    Original languageUndefined
    Title of host publicationProceedings of PSD6 Conference
    Place of PublicationAmsterdam
    Number of pages4
    Publication statusPublished - 2003
    EventPSD6 Conference: Proceedings of PSD6 Conference - Leicester, UK
    Duration: 9 Sep 200213 Sep 2002

    Publication series

    PublisherElsevier Science
    ISSN (Print)0168-9002


    ConferencePSD6 Conference
    CityLeicester, UK


    • X-ray detector
    • X-ray astronomy
    • Cryogenic sensor
    • Imaging array
    • Microcalorimeter
    • Micro machining
    • XEUS
    • METIS-207748
    • EWI-12261
    • IR-64716

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