Dielectric thin films deposited by means of ECR PECVD

I.G. Isai, Alexeij Y. Kovalgin, J. Holleman, R. Dekker, P.H. Woerlee, Hans Wallinga

    Research output: Other contributionOther research output

    Original languageUndefined
    Place of PublicationVeldhoven, The Netherlands
    Publication statusPublished - 21 Dec 1999

    Keywords

    • METIS-114847

    Cite this

    Isai, I. G., Kovalgin, A. Y., Holleman, J., Dekker, R., Woerlee, P. H., & Wallinga, H. (1999, Dec 21). Dielectric thin films deposited by means of ECR PECVD. Veldhoven, The Netherlands.
    Isai, I.G. ; Kovalgin, Alexeij Y. ; Holleman, J. ; Dekker, R. ; Woerlee, P.H. ; Wallinga, Hans. / Dielectric thin films deposited by means of ECR PECVD. 1999. Veldhoven, The Netherlands.
    @misc{b98c7d2c8ab044ac9ad7b6ea1dd2b979,
    title = "Dielectric thin films deposited by means of ECR PECVD",
    keywords = "METIS-114847",
    author = "I.G. Isai and Kovalgin, {Alexeij Y.} and J. Holleman and R. Dekker and P.H. Woerlee and Hans Wallinga",
    year = "1999",
    month = "12",
    day = "21",
    language = "Undefined",
    type = "Other",

    }

    Isai, IG, Kovalgin, AY, Holleman, J, Dekker, R, Woerlee, PH & Wallinga, H 1999, Dielectric thin films deposited by means of ECR PECVD. Veldhoven, The Netherlands.

    Dielectric thin films deposited by means of ECR PECVD. / Isai, I.G.; Kovalgin, Alexeij Y.; Holleman, J.; Dekker, R.; Woerlee, P.H.; Wallinga, Hans.

    Veldhoven, The Netherlands. 1999, .

    Research output: Other contributionOther research output

    TY - GEN

    T1 - Dielectric thin films deposited by means of ECR PECVD

    AU - Isai, I.G.

    AU - Kovalgin, Alexeij Y.

    AU - Holleman, J.

    AU - Dekker, R.

    AU - Woerlee, P.H.

    AU - Wallinga, Hans

    PY - 1999/12/21

    Y1 - 1999/12/21

    KW - METIS-114847

    M3 - Other contribution

    CY - Veldhoven, The Netherlands

    ER -

    Isai IG, Kovalgin AY, Holleman J, Dekker R, Woerlee PH, Wallinga H. Dielectric thin films deposited by means of ECR PECVD. 1999.