Diffusion and interaction studied nondestructively and in real-time with depth-resolved low energy ion spectroscopy

V.I.T.A. de Rooij-Lohmann; A.W. Kleyn; Frederik Bijkerk; H.H. Brongersma; Andrey Yakshin

doi:10.1063/1.3081034

Diffusion and interaction studied nondestructively and in real-time with depth-resolved low energy ion spectroscopy

V.I.T.A. de Rooij-Lohmann, A.W. Kleyn, Frederik Bijkerk, H.H. Brongersma, Andrey Yakshin

Research output: Contribution to journal › Article › Academic › peer-review

11 Citations (Scopus)

Abstract

An analysis procedure was developed that enables studying diffusion in ultrathin films by utilizing the depth-resolved information that is contained in the background of low energy ion scattering (LEIS) spectra. Using a high-sensitivity analyzer/detector combination allows for such a low ion dose that the ion-induced perturbation caused by this technique is negligible and not measurable with LEIS. The developed analysis procedure provides a unique opportunity to study diffusion processes in nanoscaled systems. It was applied to the Mo/Si system, a system that is relevant for extreme ultraviolet optics.

Original language	English
Pages (from-to)	063107-1-063107-3
Number of pages	3
Journal	Applied physics letters
Volume	94
Issue number	6
DOIs	https://doi.org/10.1063/1.3081034
Publication status	Published - 2009

Keywords

IR-72831
METIS-258514

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10.1063/1.3081034

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abstract = "An analysis procedure was developed that enables studying diffusion in ultrathin films by utilizing the depth-resolved information that is contained in the background of low energy ion scattering (LEIS) spectra. Using a high-sensitivity analyzer/detector combination allows for such a low ion dose that the ion-induced perturbation caused by this technique is negligible and not measurable with LEIS. The developed analysis procedure provides a unique opportunity to study diffusion processes in nanoscaled systems. It was applied to the Mo/Si system, a system that is relevant for extreme ultraviolet optics.",

keywords = "IR-72831, METIS-258514",

author = "{de Rooij-Lohmann}, V.I.T.A. and A.W. Kleyn and Frederik Bijkerk and H.H. Brongersma and Andrey Yakshin",

year = "2009",

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T1 - Diffusion and interaction studied nondestructively and in real-time with depth-resolved low energy ion spectroscopy

AU - de Rooij-Lohmann, V.I.T.A.

AU - Kleyn, A.W.

AU - Bijkerk, Frederik

AU - Brongersma, H.H.

AU - Yakshin, Andrey

PY - 2009

Y1 - 2009

N2 - An analysis procedure was developed that enables studying diffusion in ultrathin films by utilizing the depth-resolved information that is contained in the background of low energy ion scattering (LEIS) spectra. Using a high-sensitivity analyzer/detector combination allows for such a low ion dose that the ion-induced perturbation caused by this technique is negligible and not measurable with LEIS. The developed analysis procedure provides a unique opportunity to study diffusion processes in nanoscaled systems. It was applied to the Mo/Si system, a system that is relevant for extreme ultraviolet optics.

AB - An analysis procedure was developed that enables studying diffusion in ultrathin films by utilizing the depth-resolved information that is contained in the background of low energy ion scattering (LEIS) spectra. Using a high-sensitivity analyzer/detector combination allows for such a low ion dose that the ion-induced perturbation caused by this technique is negligible and not measurable with LEIS. The developed analysis procedure provides a unique opportunity to study diffusion processes in nanoscaled systems. It was applied to the Mo/Si system, a system that is relevant for extreme ultraviolet optics.

KW - IR-72831

KW - METIS-258514

U2 - 10.1063/1.3081034

DO - 10.1063/1.3081034

M3 - Article

VL - 94

SP - 063107-1-063107-3

JO - Applied physics letters

JF - Applied physics letters

SN - 0003-6951

IS - 6

ER -