Diffusion and interaction studied nondestructively and in real-time with depth-resolved low energy ion spectroscopy

V.I.T.A. de Rooij-Lohmann, A.W. Kleyn, F. Bijkerk, H.H. Brongersma, A.E. Yakshin

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Abstract

An analysis procedure was developed that enables studying diffusion in ultrathin films by utilizing the depth-resolved information that is contained in the background of low energy ion scattering (LEIS) spectra. Using a high-sensitivity analyzer/detector combination allows for such a low ion dose that the ion-induced perturbation caused by this technique is negligible and not measurable with LEIS. The developed analysis procedure provides a unique opportunity to study diffusion processes in nanoscaled systems. It was applied to the Mo/Si system, a system that is relevant for extreme ultraviolet optics.
Original languageEnglish
Pages (from-to)063107-1-063107-3
Number of pages3
JournalApplied physics letters
Volume94
Issue number6
DOIs
Publication statusPublished - 2009

Keywords

  • 2024 OA procedure

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