Diffusion on semiconductor surfaces

Henricus J.W. Zandvliet, Bene Poelsema, Brian S. Swartzentruber

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Semiconductor devices continue to get ever smaller, which means that individual defects play an increasingly important role in their performance. In the process of fabricating more innovative, better performing devices, crystal growers have developed an amazing intuition about how atoms and molecules behave on crystal surfaces. Their intuition, formed from knowledge of fundamental atomic-scale processes and honed through experience, concerns such questions as where atoms and molecules stick, how they interact with each other and the substrate, and how they diffuse
Original languageUndefined
Pages (from-to)40-45
Number of pages6
JournalPhysics today
Issue number7
Publication statusPublished - 2001


  • IR-73138
  • METIS-202541

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