Digging gold: keV He+ ion interaction with Au

V. Veligura, G. Hlawacek, R.P. Berkelaar, Raoul van Gastel, Henricus J.W. Zandvliet, Bene Poelsema

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Abstract

Helium ion microscopy (HIM) was used to investigate the interaction of a focused He+ ion beam with energies of several tens of kiloelectronvolts with metals. HIM is usually applied for the visualization of materials with extreme surface sensitivity and resolution. However, the use of high ion fluences can lead to significant sample modifications. We have characterized the changes caused by a focused He+ ion beam at normal incidence to the Au{111} surface as a function of ion fluence and energy. Under the influence of the beam a periodic surface nanopattern develops. The periodicity of the pattern shows a power-law dependence on the ion fluence. Simultaneously, helium implantation occurs. Depending on the fluence and primary energy, porous nanostructures or large blisters form on the sample surface. The growth of the helium bubbles responsible for this effect is discussed
Original languageEnglish
Pages (from-to)453-460
Number of pages8
JournalBeilstein journal of nanotechnology
Volume4
DOIs
Publication statusPublished - 2013

Fingerprint

Helium
Gold
fluence
Ions
gold
helium ions
Focused ion beams
ions
ion beams
helium
interactions
microscopy
Microscopic examination
blisters
energy
periodic variations
implantation
bubbles
incidence
Ion implantation

Keywords

  • METIS-296973
  • IR-89947

Cite this

Veligura, V. ; Hlawacek, G. ; Berkelaar, R.P. ; van Gastel, Raoul ; Zandvliet, Henricus J.W. ; Poelsema, Bene. / Digging gold: keV He+ ion interaction with Au. In: Beilstein journal of nanotechnology. 2013 ; Vol. 4. pp. 453-460.
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abstract = "Helium ion microscopy (HIM) was used to investigate the interaction of a focused He+ ion beam with energies of several tens of kiloelectronvolts with metals. HIM is usually applied for the visualization of materials with extreme surface sensitivity and resolution. However, the use of high ion fluences can lead to significant sample modifications. We have characterized the changes caused by a focused He+ ion beam at normal incidence to the Au{111} surface as a function of ion fluence and energy. Under the influence of the beam a periodic surface nanopattern develops. The periodicity of the pattern shows a power-law dependence on the ion fluence. Simultaneously, helium implantation occurs. Depending on the fluence and primary energy, porous nanostructures or large blisters form on the sample surface. The growth of the helium bubbles responsible for this effect is discussed",
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Digging gold: keV He+ ion interaction with Au. / Veligura, V.; Hlawacek, G.; Berkelaar, R.P.; van Gastel, Raoul; Zandvliet, Henricus J.W.; Poelsema, Bene.

In: Beilstein journal of nanotechnology, Vol. 4, 2013, p. 453-460.

Research output: Contribution to journalArticleAcademicpeer-review

TY - JOUR

T1 - Digging gold: keV He+ ion interaction with Au

AU - Veligura, V.

AU - Hlawacek, G.

AU - Berkelaar, R.P.

AU - van Gastel, Raoul

AU - Zandvliet, Henricus J.W.

AU - Poelsema, Bene

N1 - Open access

PY - 2013

Y1 - 2013

N2 - Helium ion microscopy (HIM) was used to investigate the interaction of a focused He+ ion beam with energies of several tens of kiloelectronvolts with metals. HIM is usually applied for the visualization of materials with extreme surface sensitivity and resolution. However, the use of high ion fluences can lead to significant sample modifications. We have characterized the changes caused by a focused He+ ion beam at normal incidence to the Au{111} surface as a function of ion fluence and energy. Under the influence of the beam a periodic surface nanopattern develops. The periodicity of the pattern shows a power-law dependence on the ion fluence. Simultaneously, helium implantation occurs. Depending on the fluence and primary energy, porous nanostructures or large blisters form on the sample surface. The growth of the helium bubbles responsible for this effect is discussed

AB - Helium ion microscopy (HIM) was used to investigate the interaction of a focused He+ ion beam with energies of several tens of kiloelectronvolts with metals. HIM is usually applied for the visualization of materials with extreme surface sensitivity and resolution. However, the use of high ion fluences can lead to significant sample modifications. We have characterized the changes caused by a focused He+ ion beam at normal incidence to the Au{111} surface as a function of ion fluence and energy. Under the influence of the beam a periodic surface nanopattern develops. The periodicity of the pattern shows a power-law dependence on the ion fluence. Simultaneously, helium implantation occurs. Depending on the fluence and primary energy, porous nanostructures or large blisters form on the sample surface. The growth of the helium bubbles responsible for this effect is discussed

KW - METIS-296973

KW - IR-89947

U2 - 10.3762/bjnano.4.53

DO - 10.3762/bjnano.4.53

M3 - Article

VL - 4

SP - 453

EP - 460

JO - Beilstein journal of nanotechnology

JF - Beilstein journal of nanotechnology

SN - 2190-4286

ER -