Dimensional Control in Corner Lithography for Wafer-Scale Fabrication of Nano-Apertures

Narges Burouni, Erwin Berenschot, Miko Elwenspoek, Niels Tas

    Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

    3 Citations (Scopus)

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    Physics & Astronomy