DIMES-01, a baseline BIFET process for smart sensor experimentation

L. K. Nanver*, E. J.G. Goudena, H. W. van Zeijl

*Corresponding author for this work

Research output: Contribution to journalArticleAcademicpeer-review

29 Citations (Scopus)
12 Downloads (Pure)

Abstract

The DIMES-01 BIFET baseline process is presented. The process and devices are described in relationship to their application in integrated silicon sensor research and development. In particular, the possibilities of introducing special sensor process modules and steps are treated.

Original languageEnglish
Pages (from-to)139-147
Number of pages9
JournalSensors and Actuators: A. Physical
Volume36
Issue number2
DOIs
Publication statusPublished - 1 Jan 1993
Externally publishedYes

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