DIMES-01, a baseline BIFET process for smart sensor experimentation

L.K. Nanver; E.J.G. Goudena; H.W. van Zeijl

doi:10.1016/0924-4247(93)85008-4

DIMES-01, a baseline BIFET process for smart sensor experimentation

L.K. Nanver^*, E.J.G. Goudena, H.W. van Zeijl

^*Corresponding author for this work

Research output: Contribution to journal › Article › Academic › peer-review

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Abstract

The DIMES-01 BIFET baseline process is presented. The process and devices are described in relationship to their application in integrated silicon sensor research and development. In particular, the possibilities of introducing special sensor process modules and steps are treated.

Original language	English
Pages (from-to)	139-147
Number of pages	9
Journal	Sensors and Actuators A: Physical
Volume	36
Issue number	2
DOIs	https://doi.org/10.1016/0924-4247(93)85008-4
Publication status	Published - 1 Jan 1993
Externally published	Yes

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title = "DIMES-01, a baseline BIFET process for smart sensor experimentation",

abstract = "The DIMES-01 BIFET baseline process is presented. The process and devices are described in relationship to their application in integrated silicon sensor research and development. In particular, the possibilities of introducing special sensor process modules and steps are treated.",

author = "L.K. Nanver and E.J.G. Goudena and {van Zeijl}, H.W.",

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DIMES-01, a baseline BIFET process for smart sensor experimentation

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