Dipole-source localization using biomimetic flow-sensor arrays positioned as lateral-line system

A.M.K. Dagamseh; Theodorus S.J. Lammerink; M.L. Kolster; C.M. Bruinink; Remco J. Wiegerink; Gijsbertus J.M. Krijnen

doi:10.1016/j.sna.2010.02.016

Dipole-source localization using biomimetic flow-sensor arrays positioned as lateral-line system

A.M.K. Dagamseh, Theodorus S.J. Lammerink, M.L. Kolster, C.M. Bruinink, Remco J. Wiegerink, Gijsbertus J.M. Krijnen

Research output: Contribution to journal › Article › Academic › peer-review

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Abstract

In-plane linear displacements of microelectromechanical systems are measured with subnanometer accuracy by observing the periodic micropatterns with a charge-coupled device camera attached to an optical microscope. The translation of the microstructure is retrieved from the video by phase-shift computation using discrete Fourier transform analysis. This approach is validated through measurements on silicon devices featuring steep-sided periodic microstructures. The results are consistent with the electrical readout of a bulk micromachined capacitive sensor, demonstrating the suitability of this technique for both calibration and sensing. Using a vibration isolation table, a standard deviation of σ = 0.13 nm could be achieved, enabling a measurement resolution of 0.5 nm (4σ) and a subpixel resolution better than 1/100 pixel. [2010-0170]

Original language	Undefined
Pages (from-to)	355-360
Number of pages	6
Journal	Sensors and Actuators A: Physical
Volume	162
Issue number	2
DOIs	https://doi.org/10.1016/j.sna.2010.02.016
Publication status	Published - 19 Feb 2010

Keywords

EWI-18544
TST-Life like
Source localization
IR-73658
Flow sensors
METIS-271055
Artificial lateral-line

Access to Document

10.1016/j.sna.2010.02.016

http://eprints.eemcs.utwente.nl/secure2/18544/01/dipole-source__-_Dagamseh_-.pdf

Cite this

@article{667b18a549974438b68bab8b6c400244,

title = "Dipole-source localization using biomimetic flow-sensor arrays positioned as lateral-line system",

abstract = "In-plane linear displacements of microelectromechanical systems are measured with subnanometer accuracy by observing the periodic micropatterns with a charge-coupled device camera attached to an optical microscope. The translation of the microstructure is retrieved from the video by phase-shift computation using discrete Fourier transform analysis. This approach is validated through measurements on silicon devices featuring steep-sided periodic microstructures. The results are consistent with the electrical readout of a bulk micromachined capacitive sensor, demonstrating the suitability of this technique for both calibration and sensing. Using a vibration isolation table, a standard deviation of σ = 0.13 nm could be achieved, enabling a measurement resolution of 0.5 nm (4σ) and a subpixel resolution better than 1/100 pixel. [2010-0170]",

keywords = "EWI-18544, TST-Life like, Source localization, IR-73658, Flow sensors, METIS-271055, Artificial lateral-line",

author = "A.M.K. Dagamseh and Lammerink, {Theodorus S.J.} and M.L. Kolster and C.M. Bruinink and Wiegerink, {Remco J.} and Krijnen, {Gijsbertus J.M.}",

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T1 - Dipole-source localization using biomimetic flow-sensor arrays positioned as lateral-line system

AU - Dagamseh, A.M.K.

AU - Lammerink, Theodorus S.J.

AU - Kolster, M.L.

AU - Bruinink, C.M.

AU - Wiegerink, Remco J.

AU - Krijnen, Gijsbertus J.M.

N1 - 10.1016/j.sna.2010.02.016

PY - 2010/2/19

Y1 - 2010/2/19

N2 - In-plane linear displacements of microelectromechanical systems are measured with subnanometer accuracy by observing the periodic micropatterns with a charge-coupled device camera attached to an optical microscope. The translation of the microstructure is retrieved from the video by phase-shift computation using discrete Fourier transform analysis. This approach is validated through measurements on silicon devices featuring steep-sided periodic microstructures. The results are consistent with the electrical readout of a bulk micromachined capacitive sensor, demonstrating the suitability of this technique for both calibration and sensing. Using a vibration isolation table, a standard deviation of σ = 0.13 nm could be achieved, enabling a measurement resolution of 0.5 nm (4σ) and a subpixel resolution better than 1/100 pixel. [2010-0170]

AB - In-plane linear displacements of microelectromechanical systems are measured with subnanometer accuracy by observing the periodic micropatterns with a charge-coupled device camera attached to an optical microscope. The translation of the microstructure is retrieved from the video by phase-shift computation using discrete Fourier transform analysis. This approach is validated through measurements on silicon devices featuring steep-sided periodic microstructures. The results are consistent with the electrical readout of a bulk micromachined capacitive sensor, demonstrating the suitability of this technique for both calibration and sensing. Using a vibration isolation table, a standard deviation of σ = 0.13 nm could be achieved, enabling a measurement resolution of 0.5 nm (4σ) and a subpixel resolution better than 1/100 pixel. [2010-0170]

KW - EWI-18544

KW - TST-Life like

KW - Source localization

KW - IR-73658

KW - Flow sensors

KW - METIS-271055

KW - Artificial lateral-line

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