Dipole-source localization using biomimetic flow-sensor arrays positioned as lateral-line system

A.M.K. Dagamseh, Theodorus S.J. Lammerink, M.L. Kolster, C.M. Bruinink, Remco J. Wiegerink, Gijsbertus J.M. Krijnen

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    In-plane linear displacements of microelectromechanical systems are measured with subnanometer accuracy by observing the periodic micropatterns with a charge-coupled device camera attached to an optical microscope. The translation of the microstructure is retrieved from the video by phase-shift computation using discrete Fourier transform analysis. This approach is validated through measurements on silicon devices featuring steep-sided periodic microstructures. The results are consistent with the electrical readout of a bulk micromachined capacitive sensor, demonstrating the suitability of this technique for both calibration and sensing. Using a vibration isolation table, a standard deviation of σ = 0.13 nm could be achieved, enabling a measurement resolution of 0.5 nm (4σ) and a subpixel resolution better than 1/100 pixel. [2010-0170]
    Original languageUndefined
    Pages (from-to)355-360
    Number of pages6
    JournalSensors and Actuators A: Physical
    Issue number2
    Publication statusPublished - 19 Feb 2010


    • EWI-18544
    • TST-Life like
    • Source localization
    • IR-73658
    • Flow sensors
    • METIS-271055
    • Artificial lateral-line

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