Direct chemical vapour deposited graphene synthesis on silicon oxide by controlled copper dewettting

Wesley T.E. van den Beld; Albert van den Berg; Jan C.T. Eijkel

Direct chemical vapour deposited graphene synthesis on silicon oxide by controlled copper dewettting

Wesley T.E. van den Beld, Albert van den Berg, Jan C.T. Eijkel

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

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Abstract

In this paper we present a novel method for direct uniform graphene synthesis onto silicon oxide in a controlled manner. On a grooved silicon oxide wafer is copper deposited under a slight angle and subsequently the substrate is treated by a typical graphene synthesis process. During this process directional dewetting of the copper into the grooves was observed. A layer of graphene was directly deposited onto the silicon oxide while the copper was retracting from the surface. This method opens new possibilities for graphene devices, since the technique can be applied wafer-scale.

Original language	English
Title of host publication	The 19th International Conference on Miniaturized Systems for Chemistry and Life Sciences (uTAS 2015)
Publisher	The Chemical and Biological Microsystems Society
Pages	1537-1539
Number of pages	3
ISBN (Print)	978-0-9798064-8-3
Publication status	Published - 25 Oct 2015
Event	19th International Conference on Miniaturized Systems for Chemistry and Life Sciences 2015 - Hwabaek International Convention Center (HICO), Gyeongju, Korea, Republic of Duration: 25 Oct 2015 → 29 Oct 2015 Conference number: 19 http://www.rsc.org/images/LOC/2015/PDFs/Copyrite.pdf

Publication series

Name	MicroTAS
Publisher	Chemical and Biological Microsystems Society
Volume	2015
ISSN (Print)	1556-5904

Conference

Conference	19th International Conference on Miniaturized Systems for Chemistry and Life Sciences 2015
Abbreviated title	MicroTas 2015
Country/Territory	Korea, Republic of
City	Gyeongju
Period	25/10/15 → 29/10/15
Internet address	http://www.rsc.org/images/LOC/2015/PDFs/Copyrite.pdf

Keywords

Chemical vapour deposition
Copper
Dewetting
Direct synthesis
Graphene

Cite this

@inproceedings{1dac887024674e6fb21d80e81b34c64d,

title = "Direct chemical vapour deposited graphene synthesis on silicon oxide by controlled copper dewettting",

abstract = "In this paper we present a novel method for direct uniform graphene synthesis onto silicon oxide in a controlled manner. On a grooved silicon oxide wafer is copper deposited under a slight angle and subsequently the substrate is treated by a typical graphene synthesis process. During this process directional dewetting of the copper into the grooves was observed. A layer of graphene was directly deposited onto the silicon oxide while the copper was retracting from the surface. This method opens new possibilities for graphene devices, since the technique can be applied wafer-scale.",

keywords = "Chemical vapour deposition, Copper, Dewetting, Direct synthesis, Graphene",

author = "{van den Beld}, {Wesley T.E.} and {van den Berg}, Albert and Eijkel, {Jan C.T.}",

year = "2015",

month = oct,

day = "25",

language = "English",

isbn = "978-0-9798064-8-3",

series = "MicroTAS",

publisher = "The Chemical and Biological Microsystems Society",

pages = "1537--1539",

booktitle = "The 19th International Conference on Miniaturized Systems for Chemistry and Life Sciences (uTAS 2015)",

note = "19th International Conference on Miniaturized Systems for Chemistry and Life Sciences 2015, MicroTas 2015 ; Conference date: 25-10-2015 Through 29-10-2015",

url = "http://www.rsc.org/images/LOC/2015/PDFs/Copyrite.pdf",

}

van den Beld, WTE , van den Berg, A & Eijkel, JCT 2015, Direct chemical vapour deposited graphene synthesis on silicon oxide by controlled copper dewettting. in The 19th International Conference on Miniaturized Systems for Chemistry and Life Sciences (uTAS 2015). MicroTAS, vol. 2015, The Chemical and Biological Microsystems Society, pp. 1537-1539, 19th International Conference on Miniaturized Systems for Chemistry and Life Sciences 2015, Gyeongju, Korea, Republic of, 25/10/15.

Direct chemical vapour deposited graphene synthesis on silicon oxide by controlled copper dewettting. / van den Beld, Wesley T.E.; van den Berg, Albert ; Eijkel, Jan C.T.
The 19th International Conference on Miniaturized Systems for Chemistry and Life Sciences (uTAS 2015). The Chemical and Biological Microsystems Society, 2015. p. 1537-1539 (MicroTAS; Vol. 2015).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

TY - GEN

T1 - Direct chemical vapour deposited graphene synthesis on silicon oxide by controlled copper dewettting

AU - van den Beld, Wesley T.E.

AU - van den Berg, Albert

AU - Eijkel, Jan C.T.

N1 - Conference code: 19

PY - 2015/10/25

Y1 - 2015/10/25

N2 - In this paper we present a novel method for direct uniform graphene synthesis onto silicon oxide in a controlled manner. On a grooved silicon oxide wafer is copper deposited under a slight angle and subsequently the substrate is treated by a typical graphene synthesis process. During this process directional dewetting of the copper into the grooves was observed. A layer of graphene was directly deposited onto the silicon oxide while the copper was retracting from the surface. This method opens new possibilities for graphene devices, since the technique can be applied wafer-scale.

AB - In this paper we present a novel method for direct uniform graphene synthesis onto silicon oxide in a controlled manner. On a grooved silicon oxide wafer is copper deposited under a slight angle and subsequently the substrate is treated by a typical graphene synthesis process. During this process directional dewetting of the copper into the grooves was observed. A layer of graphene was directly deposited onto the silicon oxide while the copper was retracting from the surface. This method opens new possibilities for graphene devices, since the technique can be applied wafer-scale.

KW - Chemical vapour deposition

KW - Copper

KW - Dewetting

KW - Direct synthesis

KW - Graphene

UR - http://www.scopus.com/inward/record.url?scp=84983249326&partnerID=8YFLogxK

M3 - Conference contribution

SN - 978-0-9798064-8-3

T3 - MicroTAS

SP - 1537

EP - 1539

BT - The 19th International Conference on Miniaturized Systems for Chemistry and Life Sciences (uTAS 2015)

PB - The Chemical and Biological Microsystems Society

T2 - 19th International Conference on Miniaturized Systems for Chemistry and Life Sciences 2015

Y2 - 25 October 2015 through 29 October 2015

ER -

Direct chemical vapour deposited graphene synthesis on silicon oxide by controlled copper dewettting

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