Direct chemical vapour deposited graphene synthesis on silicon oxide by controlled copper dewettting

    Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

    1 Downloads (Pure)

    Abstract

    In this paper we present a novel method for direct uniform graphene synthesis onto silicon oxide in a controlled manner. On a grooved silicon oxide wafer is copper deposited under a slight angle and subsequently the substrate is treated by a typical graphene synthesis process. During this process directional dewetting of the copper into the grooves was observed. A layer of graphene was directly deposited onto the silicon oxide while the copper was retracting from the surface. This method opens new possibilities for graphene devices, since the technique can be applied wafer-scale.
    Original languageEnglish
    Title of host publicationThe 19th International Conference on Miniaturized Systems for Chemistry and Life Sciences (uTAS 2015)
    PublisherChemical and Biological Micro Systems Society
    Pages1537-1539
    Number of pages3
    ISBN (Print)978-0-9798064-8-3
    Publication statusPublished - 25 Oct 2015
    Event19th International Conference on Miniaturized Systems for Chemistry and Life Sciences, MicroTAS 2015 - Gyeongju, Korea, Republic of
    Duration: 25 Oct 201529 Oct 2015

    Publication series

    NameMicroTAS
    PublisherChemical and Biological Microsystems Society
    Volume2015
    ISSN (Print)1556-5904

    Conference

    Conference19th International Conference on Miniaturized Systems for Chemistry and Life Sciences, MicroTAS 2015
    CountryKorea, Republic of
    CityGyeongju
    Period25/10/1529/10/15

    Keywords

    • Chemical vapour deposition
    • Copper
    • Dewetting
    • Direct synthesis
    • Graphene

    Fingerprint Dive into the research topics of 'Direct chemical vapour deposited graphene synthesis on silicon oxide by controlled copper dewettting'. Together they form a unique fingerprint.

  • Cite this

    van den Beld, W. T. E., van den Berg, A., & Eijkel, J. C. T. (2015). Direct chemical vapour deposited graphene synthesis on silicon oxide by controlled copper dewettting. In The 19th International Conference on Miniaturized Systems for Chemistry and Life Sciences (uTAS 2015) (pp. 1537-1539). (MicroTAS; Vol. 2015). Chemical and Biological Micro Systems Society.