Direct differential micro Coriolis mass flow sensor to detect the efficiency of a preconcentrator system

Jarno Groenesteijn, Hai-Nan Zhang, H. Zhang, Roald M. Tiggelaar, Theodorus S.J. Lammerink, Joost Conrad Lötters, Johannes G.E. Gardeniers, Remco J. Wiegerink

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Abstract

We have designed and fabricated the first direct differential micro Coriolis mass flow meter (MFM). The direct differential nature of the sensor allows for accurate measurement of small differences between large flows. The differential measurement is achieved by fabricating two parallel, mechanically coupled micro-channels. By applying the two mass flows in opposite direction, the detected mass flow is proportional to the difference in Coriolis force on the two channels. We demonstrated this sensing principle by detecting the amount of water evaporated from a solution by a preconcentrator.
Original languageUndefined
Title of host publicationProceedings of MicroTAS 2013
Place of PublicationStoughton, USA
PublisherPrinting House Inc.
PagesT.042c
Number of pages3
ISBN (Print)978-0-9798064-6-9
Publication statusPublished - 27 Oct 2013
Event17th International Conference on Miniaturized Systems for Chemistry and Life Sciences, μTAS 2013 - Freiburg, Germany
Duration: 27 Oct 201331 Oct 2013
Conference number: 17

Conference

Conference17th International Conference on Miniaturized Systems for Chemistry and Life Sciences, μTAS 2013
Abbreviated titleMicroTAS
CountryGermany
CityFreiburg
Period27/10/1331/10/13

Keywords

  • EWI-24006
  • Pre-Concentrator
  • METIS-300173
  • Differential Mass Flow Sensor
  • Coriolis
  • IR-87993

Cite this

Groenesteijn, J., Zhang, H-N., Zhang, H., Tiggelaar, R. M., Lammerink, T. S. J., Lötters, J. C., ... Wiegerink, R. J. (2013). Direct differential micro Coriolis mass flow sensor to detect the efficiency of a preconcentrator system. In Proceedings of MicroTAS 2013 (pp. T.042c). Stoughton, USA: Printing House Inc..