Direct differential micro Coriolis mass flow sensor to detect the efficiency of a preconcentrator system

Jarno Groenesteijn; Hai-Nan Zhang; H. Zhang; Roald M. Tiggelaar; Theodorus S.J. Lammerink; Joost Conrad Lötters; Johannes G.E. Gardeniers; Remco J. Wiegerink

Direct differential micro Coriolis mass flow sensor to detect the efficiency of a preconcentrator system

Jarno Groenesteijn, Hai-Nan Zhang, H. Zhang, Roald M. Tiggelaar, Theodorus S.J. Lammerink, Joost Conrad Lötters, Johannes G.E. Gardeniers, Remco J. Wiegerink

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

1 Citation (Scopus)

3 Downloads (Pure)

Abstract

We have designed and fabricated the first direct differential micro Coriolis mass flow meter (MFM). The direct differential nature of the sensor allows for accurate measurement of small differences between large flows. The differential measurement is achieved by fabricating two parallel, mechanically coupled micro-channels. By applying the two mass flows in opposite direction, the detected mass flow is proportional to the difference in Coriolis force on the two channels. We demonstrated this sensing principle by detecting the amount of water evaporated from a solution by a preconcentrator.

Original language	Undefined
Title of host publication	Proceedings of MicroTAS 2013
Place of Publication	Stoughton, USA
Publisher	Printing House Inc.
Pages	T.042c
Number of pages	3
ISBN (Print)	978-0-9798064-6-9
Publication status	Published - 27 Oct 2013
Event	17th International Conference on Miniaturized Systems for Chemistry and Life Sciences, μTAS 2013 - Freiburg, Germany Duration: 27 Oct 2013 → 31 Oct 2013 Conference number: 17

Conference

Conference	17th International Conference on Miniaturized Systems for Chemistry and Life Sciences, μTAS 2013
Abbreviated title	MicroTAS
Country/Territory	Germany
City	Freiburg
Period	27/10/13 → 31/10/13

Keywords

EWI-24006
Pre-Concentrator
METIS-300173
Differential Mass Flow Sensor
Coriolis
IR-87993

Access to Document

http://eprints.eemcs.utwente.nl/secure2/24006/01/microTAS_2013_final.pdf

Cite this

Groenesteijn, J., Zhang, H.-N., Zhang, H., Tiggelaar, R. M., Lammerink, T. S. J., Lötters, J. C., Gardeniers, J. G. E., & Wiegerink, R. J. (2013). Direct differential micro Coriolis mass flow sensor to detect the efficiency of a preconcentrator system. In Proceedings of MicroTAS 2013 (pp. T.042c). Printing House Inc.. http://eprints.eemcs.utwente.nl/secure2/24006/01/microTAS_2013_final.pdf

@inproceedings{efc13368d0294be480065cd1d8c52d39,

title = "Direct differential micro Coriolis mass flow sensor to detect the efficiency of a preconcentrator system",

abstract = "We have designed and fabricated the first direct differential micro Coriolis mass flow meter (MFM). The direct differential nature of the sensor allows for accurate measurement of small differences between large flows. The differential measurement is achieved by fabricating two parallel, mechanically coupled micro-channels. By applying the two mass flows in opposite direction, the detected mass flow is proportional to the difference in Coriolis force on the two channels. We demonstrated this sensing principle by detecting the amount of water evaporated from a solution by a preconcentrator.",

keywords = "EWI-24006, Pre-Concentrator, METIS-300173, Differential Mass Flow Sensor, Coriolis, IR-87993",

author = "Jarno Groenesteijn and Hai-Nan Zhang and H. Zhang and Tiggelaar, {Roald M.} and Lammerink, {Theodorus S.J.} and L{\"o}tters, {Joost Conrad} and Gardeniers, {Johannes G.E.} and Wiegerink, {Remco J.}",

note = "http://microtas2013.org/; 17th International Conference on Miniaturized Systems for Chemistry and Life Sciences, μTAS 2013 ; Conference date: 27-10-2013 Through 31-10-2013",

year = "2013",

month = oct,

day = "27",

language = "Undefined",

isbn = "978-0-9798064-6-9",

pages = "T.042c",

booktitle = "Proceedings of MicroTAS 2013",

publisher = "Printing House Inc.",

}

Groenesteijn, J, Zhang, H-N, Zhang, H, Tiggelaar, RM, Lammerink, TSJ, Lötters, JC , Gardeniers, JGE & Wiegerink, RJ 2013, Direct differential micro Coriolis mass flow sensor to detect the efficiency of a preconcentrator system. in Proceedings of MicroTAS 2013. Printing House Inc., Stoughton, USA, pp. T.042c, 17th International Conference on Miniaturized Systems for Chemistry and Life Sciences, μTAS 2013, Freiburg, Germany, 27/10/13. <http://eprints.eemcs.utwente.nl/secure2/24006/01/microTAS_2013_final.pdf>

TY - GEN

T1 - Direct differential micro Coriolis mass flow sensor to detect the efficiency of a preconcentrator system

AU - Groenesteijn, Jarno

AU - Zhang, Hai-Nan

AU - Zhang, H.

AU - Tiggelaar, Roald M.

AU - Lammerink, Theodorus S.J.

AU - Lötters, Joost Conrad

AU - Gardeniers, Johannes G.E.

AU - Wiegerink, Remco J.

N1 - Conference code: 17

PY - 2013/10/27

Y1 - 2013/10/27

N2 - We have designed and fabricated the first direct differential micro Coriolis mass flow meter (MFM). The direct differential nature of the sensor allows for accurate measurement of small differences between large flows. The differential measurement is achieved by fabricating two parallel, mechanically coupled micro-channels. By applying the two mass flows in opposite direction, the detected mass flow is proportional to the difference in Coriolis force on the two channels. We demonstrated this sensing principle by detecting the amount of water evaporated from a solution by a preconcentrator.

AB - We have designed and fabricated the first direct differential micro Coriolis mass flow meter (MFM). The direct differential nature of the sensor allows for accurate measurement of small differences between large flows. The differential measurement is achieved by fabricating two parallel, mechanically coupled micro-channels. By applying the two mass flows in opposite direction, the detected mass flow is proportional to the difference in Coriolis force on the two channels. We demonstrated this sensing principle by detecting the amount of water evaporated from a solution by a preconcentrator.

KW - EWI-24006

KW - Pre-Concentrator

KW - METIS-300173

KW - Differential Mass Flow Sensor

KW - Coriolis

KW - IR-87993

M3 - Conference contribution

SN - 978-0-9798064-6-9

SP - T.042c

BT - Proceedings of MicroTAS 2013

PB - Printing House Inc.

CY - Stoughton, USA

T2 - 17th International Conference on Miniaturized Systems for Chemistry and Life Sciences, μTAS 2013

Y2 - 27 October 2013 through 31 October 2013

ER -