Direct measurement of piezoelectric properties of Sol-Gel PZT films

Johannes G.E. Gardeniers, A.G.B.J. Verholen, A.G.B.J. Verholen, Niels Roelof Tas, Michael Curt Elwenspoek

Research output: Contribution to journalArticleAcademicpeer-review

22 Citations (Scopus)
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