Direct surface structuring of organometallic resists using nanoimprint lithography

Research output: Contribution to journal › Article › Academic › peer-review

Keywords

@article{b1d9e6afbfd04d94812b22095753e45c,

title = "Direct surface structuring of organometallic resists using nanoimprint lithography",

keywords = "METIS-259835",

author = "C. Acikgoz and Hempenius, {Mark A.} and Vancso, {Gyula J.} and Jurriaan Huskens",

year = "2009",

language = "Undefined",

volume = "20",

pages = "135304--",

journal = "Nanotechnology",

issn = "0957-4484",

publisher = "Institute of Physics (IOP)",

}