Direct wafer bonding with chemical mechanical polishing

C. Gui

    Research output: Thesis › PhD Thesis - Research UT, graduation UT

    Original languageUndefined
    Supervisors/Advisors
    • Elwenspoek, Michael Curt, Supervisor
    • Gardeniers, J.G.E., Advisor
    • Lambeck, Paul, Advisor
    Award date13 Nov 1998
    Place of PublicationEnschede
    Publisher
    Print ISBNs90-36512328
    Publication statusPublished - 13 Nov 1998

    Keywords

    • METIS-111371

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