The omni-directional sensitivity pattern of an integrated three dimensional acoustic sensor, composed of four hot-wire particle velocity sensors is analyzed theoretically and experimentally. We investigate the influence of the presence of the probe surface on the direction of the measured particle velocity measured by the sensors, and a description of the gas flow profile around the integrated sensor is presented.
|Publisher||Southampton University Press|
|Conference||17 workshop on Micromachining, Micromechanics and Microsystems, Southampton|
|Period||6/09/06 → …|