Directional sensitivity of a three dimensional particle velocity sensor

J.W. van Honschoten, Doekle Reinder Yntema, Remco J. Wiegerink, Michael Curt Elwenspoek

    Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

    29 Downloads (Pure)

    Abstract

    The omni-directional sensitivity pattern of an integrated three dimensional acoustic sensor, composed of four hot-wire particle velocity sensors is analyzed theoretically and experimentally. We investigate the influence of the presence of the probe surface on the direction of the measured particle velocity measured by the sensors, and a description of the gas flow profile around the integrated sensor is presented.
    Original languageUndefined
    Title of host publicationProceedings of the 17 workshop on Micromachining, Micromechanics and Microsystems
    Place of PublicationSouthampton
    PublisherSouthampton University Press
    Pages201-204
    Number of pages4
    ISBN (Print)085432-848-3
    Publication statusPublished - 6 Sep 2006
    Event17 workshop on Micromachining, Micromechanics and Microsystems, Southampton: Proceedings of the 17 workshop on Micromachining, Micromechanics and Microsystems - Southampton
    Duration: 6 Sep 2006 → …

    Publication series

    Name
    PublisherSouthampton University Press
    Number11

    Conference

    Conference17 workshop on Micromachining, Micromechanics and Microsystems, Southampton
    CitySouthampton
    Period6/09/06 → …

    Keywords

    • EWI-9099
    • METIS-238758
    • IR-66878

    Cite this