Discharge instabilities in ArF excimer laser gas mixtures

Research output: Contribution to conference › Poster › Other research output

Original language	Undefined
Pages	-
Publication status	Published - 21 Mar 2006
Event	18 NNV/CPS Symposium Plasmafysica en Stralingstechnologie - Lunteren Duration: 21 Mar 2006 → 23 Mar 2006

Conference	18 NNV/CPS Symposium Plasmafysica en Stralingstechnologie
City	Lunteren
Period	21/03/06 → 23/03/06

Keywords

@conference{d6ef012648344840a3b663210fc55081,

title = "Discharge instabilities in ArF excimer laser gas mixtures",

keywords = "METIS-231211",

author = "D. Mathew and Bastiaens, \{Hubertus M.J.\} and Boller, \{Klaus J.\} and P.J.M. Peters",

year = "2006",

month = mar,

day = "21",

language = "Undefined",

pages = "--",

note = "18 NNV/CPS Symposium Plasmafysica en Stralingstechnologie ; Conference date: 21-03-2006 Through 23-03-2006",

}