Discharge technology for excimer lasers of high-average power

W.J. Witteman, G.B. Ekelmans, M. Trentelman, F.A. van Goor

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Abstract

The self-sustained discharge of excimers is analyzed. Several excitation schemes that have been successfully applied are compared. For high repetition rate operation not only the discharge stability and its efficiency are important selection criteria but more important is the potential of fast discharge switching with minimum pulse energy. Pulse compression plays a key role in the laser performance. A technology for low energy compression is described.
Original languageEnglish
Title of host publicationProceedings 8th International Symposium on Gas Flow and Chemical Lasers 1990
PublisherSPIE
Pages37-45
DOIs
Publication statusPublished - 10 Sept 1990
Event8th International Symposium on Gas Flow and Chemical Lasers - Madrid, Spain
Duration: 10 Sept 199014 Sept 1990

Publication series

NameProceedings of SPIE
PublisherSPIE
Volume1397
ISSN (Print)0277-786X

Conference

Conference8th International Symposium on Gas Flow and Chemical Lasers
Period10/09/9014/09/90
Other10-14 September 1990

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