The self-sustained discharge of excimers is analyzed. Several excitation schemes that have been successfully applied are compared. For high repetition rate operation not only the discharge stability and its efficiency are important selection criteria but more important is the potential of fast discharge switching with minimum pulse energy. Pulse compression plays a key role in the laser performance. A technology for low energy compression is described.
|Name||Proceedings of SPIE|
|Conference||8th International Symposium on Gas Flow and Chemical Lasers|
|Period||10/09/90 → 14/09/90|
|Other||10-14 September 1990|