Dishing behaviour of copper lines in copper chemical mechanical polishing

V. Nguyen Hoang

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

Keywords

@inproceedings{7d561b4ba1c142ccbc4c8de5cc9783c8,

title = "Dishing behaviour of copper lines in copper chemical mechanical polishing",

keywords = "METIS-113880",

author = "{Nguyen Hoang}, V.",

year = "1998",

month = nov,

day = "26",

language = "Undefined",

isbn = "CD ROM 90-73461",

pages = "--",

booktitle = "Proceedings of the SAFE'98",

}