Dishing behaviour of copper lines in copper chemical mechanical polishing

V. Nguyen Hoang

    Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

    Original languageUndefined
    Title of host publicationProceedings of the SAFE'98
    Place of PublicationMierlo, the Netherlands
    Pages-
    Publication statusPublished - 26 Nov 1998

    Keywords

    • METIS-113880

    Cite this

    Nguyen Hoang, V. (1998). Dishing behaviour of copper lines in copper chemical mechanical polishing. In Proceedings of the SAFE'98 (pp. -). Mierlo, the Netherlands.