Dishing behaviour of copper lines in copper chemical mechanical polishing

V. Nguyen Hoang

    Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

    Original languageUndefined
    Title of host publicationProceedings of the SAFE'98
    Place of PublicationMierlo, the Netherlands
    Pages-
    Publication statusPublished - 26 Nov 1998

    Keywords

    • METIS-113880

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