Dislocation engineering for silicon devices

J.S. Custer, J.R. Liefting, R.J. Schreutelkamp, R.C.M. Wijburg, Hans Wallinga, F.W. Saris

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

Original languageUndefined
Title of host publicationProceedings of the 1992 International Conference on Solid State Devices and Materials
Place of PublicationTsukuba, Japan
Pages38-39
Number of pages0
Publication statusPublished - 26 Aug 1992

Keywords

  • METIS-113928

Cite this

Custer, J. S., Liefting, J. R., Schreutelkamp, R. J., Wijburg, R. C. M., Wallinga, H., & Saris, F. W. (1992). Dislocation engineering for silicon devices. In Proceedings of the 1992 International Conference on Solid State Devices and Materials (pp. 38-39). Tsukuba, Japan.
Custer, J.S. ; Liefting, J.R. ; Schreutelkamp, R.J. ; Wijburg, R.C.M. ; Wallinga, Hans ; Saris, F.W. / Dislocation engineering for silicon devices. Proceedings of the 1992 International Conference on Solid State Devices and Materials. Tsukuba, Japan, 1992. pp. 38-39
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title = "Dislocation engineering for silicon devices",
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author = "J.S. Custer and J.R. Liefting and R.J. Schreutelkamp and R.C.M. Wijburg and Hans Wallinga and F.W. Saris",
year = "1992",
month = "8",
day = "26",
language = "Undefined",
pages = "38--39",
booktitle = "Proceedings of the 1992 International Conference on Solid State Devices and Materials",

}

Custer, JS, Liefting, JR, Schreutelkamp, RJ, Wijburg, RCM, Wallinga, H & Saris, FW 1992, Dislocation engineering for silicon devices. in Proceedings of the 1992 International Conference on Solid State Devices and Materials. Tsukuba, Japan, pp. 38-39.

Dislocation engineering for silicon devices. / Custer, J.S.; Liefting, J.R.; Schreutelkamp, R.J.; Wijburg, R.C.M.; Wallinga, Hans; Saris, F.W.

Proceedings of the 1992 International Conference on Solid State Devices and Materials. Tsukuba, Japan, 1992. p. 38-39.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

TY - GEN

T1 - Dislocation engineering for silicon devices

AU - Custer, J.S.

AU - Liefting, J.R.

AU - Schreutelkamp, R.J.

AU - Wijburg, R.C.M.

AU - Wallinga, Hans

AU - Saris, F.W.

PY - 1992/8/26

Y1 - 1992/8/26

KW - METIS-113928

M3 - Conference contribution

SP - 38

EP - 39

BT - Proceedings of the 1992 International Conference on Solid State Devices and Materials

CY - Tsukuba, Japan

ER -

Custer JS, Liefting JR, Schreutelkamp RJ, Wijburg RCM, Wallinga H, Saris FW. Dislocation engineering for silicon devices. In Proceedings of the 1992 International Conference on Solid State Devices and Materials. Tsukuba, Japan. 1992. p. 38-39