Dislocation engineering for silicon devices

J.S. Custer, J.R. Liefting, R.J. Schreutelkamp, R.C.M. Wijburg, Hans Wallinga, F.W. Saris

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

Original language	Undefined
Title of host publication	Proceedings of the 1992 International Conference on Solid State Devices and Materials
Place of Publication	Tsukuba, Japan
Pages	38-39
Number of pages	0
Publication status	Published - 26 Aug 1992

Keywords

@inproceedings{77356d330c5943caa8a0259ba88cd101,

title = "Dislocation engineering for silicon devices",

keywords = "METIS-113928",

author = "J.S. Custer and J.R. Liefting and R.J. Schreutelkamp and R.C.M. Wijburg and Hans Wallinga and F.W. Saris",

year = "1992",

month = aug,

day = "26",

language = "Undefined",

pages = "38--39",

booktitle = "Proceedings of the 1992 International Conference on Solid State Devices and Materials",

}

TY - GEN

T1 - Dislocation engineering for silicon devices

AU - Custer, J.S.

AU - Liefting, J.R.

AU - Schreutelkamp, R.J.

AU - Wijburg, R.C.M.

AU - Wallinga, Hans

AU - Saris, F.W.

PY - 1992/8/26

Y1 - 1992/8/26

KW - METIS-113928

M3 - Conference contribution

SP - 38

EP - 39

BT - Proceedings of the 1992 International Conference on Solid State Devices and Materials

CY - Tsukuba, Japan

ER -