Displacement sensing by field emission with nanometer resolution

A.J. le Fèbre; Martin Herman Siekman; Leon Abelmann; J.C. Lodder

doi:10.1109/SENSOR.2007.4300644

Displacement sensing by field emission with nanometer resolution

A.J. le Fèbre, Martin Herman Siekman, Leon Abelmann, J.C. Lodder

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

4 Citations (Scopus)

133 Downloads (Pure)

Abstract

Field emission is used as a displacement sensing method, exploiting the exponential relation between field emission current and electrode gap. Atomic force microscopy (AFM) probes have been used as field emission source to measure I/V characteristics which were found to correspond well to theory. The field emission sensor was operated in a more linear regime by using feedback on the position of the probe in order to maintain a constant current. The sensitivity of the sensor for displacement was found to be 0.26 V/nm at a range of ~100 nm. From the experimental data, typical parameters for the Fowler-Nordheim equation were deduced and used to model the sensor performance. The measurements confirm that field emission can be applied to sense the distance between a probe tip and sample with <20 nm resolution.

Original language	Undefined
Title of host publication	Transducers 2007 & Eurosensors XXI Digest of Technical Papers
Place of Publication	Los Alamitos
Publisher	IEEE
Pages	2361-2364
Number of pages	4
ISBN (Print)	1-4244-0841-5
DOIs	https://doi.org/10.1109/SENSOR.2007.4300644
Publication status	Published - Jun 2007
Event	21st European Conference on Solid-State Transducers, Eurosensors XXI - Lyon, France Duration: 10 Jun 2007 → 14 Jun 2007 Conference number: 21

Publication series

Name
Publisher	IEEE Computer Society Press

Conference

Conference	21st European Conference on Solid-State Transducers, Eurosensors XXI
Abbreviated title	Eurosensors
Country/Territory	France
City	Lyon
Period	10/06/07 → 14/06/07

Keywords

TST-uSPAM: micro Scanning Probe Array Memory
METIS-245713
TST-SMI: Formerly in EWI-SMI
EWI-9810
IR-64020

Access to Document

10.1109/SENSOR.2007.4300644

Cite this

@inproceedings{2231b673ef7d4c6c84ab18b40e3e4db3,

title = "Displacement sensing by field emission with nanometer resolution",

abstract = "Field emission is used as a displacement sensing method, exploiting the exponential relation between field emission current and electrode gap. Atomic force microscopy (AFM) probes have been used as field emission source to measure I/V characteristics which were found to correspond well to theory. The field emission sensor was operated in a more linear regime by using feedback on the position of the probe in order to maintain a constant current. The sensitivity of the sensor for displacement was found to be 0.26 V/nm at a range of ~100 nm. From the experimental data, typical parameters for the Fowler-Nordheim equation were deduced and used to model the sensor performance. The measurements confirm that field emission can be applied to sense the distance between a probe tip and sample with <20 nm resolution.",

keywords = "TST-uSPAM: micro Scanning Probe Array Memory, METIS-245713, TST-SMI: Formerly in EWI-SMI, EWI-9810, IR-64020",

author = "{le F{\`e}bre}, A.J. and Siekman, {Martin Herman} and Leon Abelmann and J.C. Lodder",

note = "IEEE 07TH8933; null ; Conference date: 10-06-2007 Through 14-06-2007",

year = "2007",

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doi = "10.1109/SENSOR.2007.4300644",

language = "Undefined",

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publisher = "IEEE",

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booktitle = "Transducers 2007 & Eurosensors XXI Digest of Technical Papers",

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TY - GEN

T1 - Displacement sensing by field emission with nanometer resolution

AU - le Fèbre, A.J.

AU - Siekman, Martin Herman

AU - Abelmann, Leon

AU - Lodder, J.C.

N1 - Conference code: 21

PY - 2007/6

Y1 - 2007/6

N2 - Field emission is used as a displacement sensing method, exploiting the exponential relation between field emission current and electrode gap. Atomic force microscopy (AFM) probes have been used as field emission source to measure I/V characteristics which were found to correspond well to theory. The field emission sensor was operated in a more linear regime by using feedback on the position of the probe in order to maintain a constant current. The sensitivity of the sensor for displacement was found to be 0.26 V/nm at a range of ~100 nm. From the experimental data, typical parameters for the Fowler-Nordheim equation were deduced and used to model the sensor performance. The measurements confirm that field emission can be applied to sense the distance between a probe tip and sample with <20 nm resolution.

AB - Field emission is used as a displacement sensing method, exploiting the exponential relation between field emission current and electrode gap. Atomic force microscopy (AFM) probes have been used as field emission source to measure I/V characteristics which were found to correspond well to theory. The field emission sensor was operated in a more linear regime by using feedback on the position of the probe in order to maintain a constant current. The sensitivity of the sensor for displacement was found to be 0.26 V/nm at a range of ~100 nm. From the experimental data, typical parameters for the Fowler-Nordheim equation were deduced and used to model the sensor performance. The measurements confirm that field emission can be applied to sense the distance between a probe tip and sample with <20 nm resolution.

KW - TST-uSPAM: micro Scanning Probe Array Memory

KW - METIS-245713

KW - TST-SMI: Formerly in EWI-SMI

KW - EWI-9810

KW - IR-64020

U2 - 10.1109/SENSOR.2007.4300644

DO - 10.1109/SENSOR.2007.4300644

M3 - Conference contribution

SN - 1-4244-0841-5

SP - 2361

EP - 2364

BT - Transducers 2007 & Eurosensors XXI Digest of Technical Papers

PB - IEEE

CY - Los Alamitos

Y2 - 10 June 2007 through 14 June 2007

ER -