Distinction of the irreversible and reversible actuation regions of b-doped poly-si based electrothermal actuators

S. Deladi, G.J.M. Krijnen, M.C. Elwenspoek

    Research output: Contribution to journalArticleAcademicpeer-review

    6 Citations (Scopus)

    Abstract

    Polycrystalline-Si microactuators based on electrothermal principles exhibit many interesting features but their practical use is severely limited by permanent damage that may occur due to accidental overheating. Under these conditions, polycrystalline-Si structures will display irreversible structural changes ranging from slight geometrical deformations to complete damage. In this paper, an approach is presented to avoid permanent structural deformation of B-doped polycrystalline-Si based electrothermal actuators by overheating. The method allows us to distinguish reversible and irreversible actuation conditions and is demonstrated under environmental and vacuum conditions. It enables full utilization of the capabilities of B-doped polycrystalline-Si based electrothermal actuators with reproducible performance.
    Original languageEnglish
    Pages (from-to)S31-S36
    Number of pages6
    JournalJournal of micromechanics and microengineering
    Volume14
    Issue number9
    DOIs
    Publication statusPublished - 20 Aug 2004
    Event14th MicroMechanics Europe Workshop, MME 2003 - Delft, Netherlands
    Duration: 2 Nov 20034 Nov 2003
    Conference number: 14

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