Polycrystalline-Si microactuators based on electrothermal principles exhibit many interesting features but their practical use is severely limited by permanent damage that may occur due to accidental overheating. Under these conditions, polycrystalline-Si structures will display irreversible structural changes ranging from slight geometrical deformations to complete damage. In this paper, an approach is presented to avoid permanent structural deformation of B-doped polycrystalline-Si based electrothermal actuators by overheating. The method allows us to distinguish reversible and irreversible actuation conditions and is demonstrated under environmental and vacuum conditions. It enables full utilization of the capabilities of B-doped polycrystalline-Si based electrothermal actuators with reproducible performance.
|Number of pages||6|
|Journal||Journal of micromechanics and microengineering|
|Publication status||Published - 20 Aug 2004|
|Event||14th MicroMechanics Europe Workshop, MME 2003 - Delft, Netherlands|
Duration: 2 Nov 2003 → 4 Nov 2003
Conference number: 14