Distinction of the irreversible and reversible actuation regions of B-doped poly-Si based elctrothermal actuators

S. Deladi, G.J.M. Krijnen, M.C. Elwenspoek

    Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

    Original languageEnglish
    Title of host publicationProceedings of the MME Conference 2003
    Place of PublicationDelft
    Pages49-52
    Publication statusPublished - 2003
    Event14th MicroMechanics Europe Workshop, MME 2003 - Delft, Netherlands
    Duration: 2 Nov 20034 Nov 2003
    Conference number: 14

    Conference

    Conference14th MicroMechanics Europe Workshop, MME 2003
    Abbreviated titleMME
    CountryNetherlands
    CityDelft
    Period2/11/034/11/03

    Cite this