Distinction of the irreversible and reversible actuation regions of B-doped poly-Si based elctrothermal actuators

S. Deladi, G.J.M. Krijnen, M.C. Elwenspoek

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2004
Distinction of the irreversible and reversible actuation regions of b-doped poly-si based electrothermal actuators
Deladi, S., Krijnen, G. J. M. & Elwenspoek, M. C., 20 Aug 2004, In: Journal of micromechanics and microengineering. 14, 9, p. S31-S36 6 p.
Research output: Contribution to journal › Article › Academic › peer-review
6 Citations (Scopus)

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