Distinction of the irreversible and reversible actuation regions of b-doped poly-si based electrothermal actuators

S. Deladi; G.J.M. Krijnen; M.C. Elwenspoek

doi:10.1088/0960-1317/14/9/005

Distinction of the irreversible and reversible actuation regions of b-doped poly-si based electrothermal actuators

S. Deladi
, G.J.M. Krijnen
, M.C. Elwenspoek

Research output: Contribution to journal › Article › Academic › peer-review

6 Citations (Scopus)

18 Downloads (Pure)

Abstract

Polycrystalline-Si microactuators based on electrothermal principles exhibit many interesting features but their practical use is severely limited by permanent damage that may occur due to accidental overheating. Under these conditions, polycrystalline-Si structures will display irreversible structural changes ranging from slight geometrical deformations to complete damage. In this paper, an approach is presented to avoid permanent structural deformation of B-doped polycrystalline-Si based electrothermal actuators by overheating. The method allows us to distinguish reversible and irreversible actuation conditions and is demonstrated under environmental and vacuum conditions. It enables full utilization of the capabilities of B-doped polycrystalline-Si based electrothermal actuators with reproducible performance.

Original language	English
Pages (from-to)	S31-S36
Number of pages	6
Journal	Journal of micromechanics and microengineering
Volume	14
Issue number	9
DOIs	https://doi.org/10.1088/0960-1317/14/9/005
Publication status	Published - 20 Aug 2004
Event	14th MicroMechanics Europe Workshop, MME 2003 - Delft, Netherlands Duration: 2 Nov 2003 → 4 Nov 2003 Conference number: 14

Access to Document

10.1088/0960-1317/14/9/005

Distinction of the irreversible and reversible actuation regions of B-doped poly-Si based elctrothermal actuators
Deladi, S., Krijnen, G. J. M. & Elwenspoek, M. C., 2003, Proceedings of the MME Conference 2003. Delft, p. 49-52
Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

Cite this

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title = "Distinction of the irreversible and reversible actuation regions of b-doped poly-si based electrothermal actuators",

abstract = "Polycrystalline-Si microactuators based on electrothermal principles exhibit many interesting features but their practical use is severely limited by permanent damage that may occur due to accidental overheating. Under these conditions, polycrystalline-Si structures will display irreversible structural changes ranging from slight geometrical deformations to complete damage. In this paper, an approach is presented to avoid permanent structural deformation of B-doped polycrystalline-Si based electrothermal actuators by overheating. The method allows us to distinguish reversible and irreversible actuation conditions and is demonstrated under environmental and vacuum conditions. It enables full utilization of the capabilities of B-doped polycrystalline-Si based electrothermal actuators with reproducible performance.",

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TY - JOUR

T1 - Distinction of the irreversible and reversible actuation regions of b-doped poly-si based electrothermal actuators

AU - Deladi, S.

AU - Krijnen, G.J.M.

AU - Elwenspoek, M.C.

N1 - Conference code: 14

PY - 2004/8/20

Y1 - 2004/8/20

N2 - Polycrystalline-Si microactuators based on electrothermal principles exhibit many interesting features but their practical use is severely limited by permanent damage that may occur due to accidental overheating. Under these conditions, polycrystalline-Si structures will display irreversible structural changes ranging from slight geometrical deformations to complete damage. In this paper, an approach is presented to avoid permanent structural deformation of B-doped polycrystalline-Si based electrothermal actuators by overheating. The method allows us to distinguish reversible and irreversible actuation conditions and is demonstrated under environmental and vacuum conditions. It enables full utilization of the capabilities of B-doped polycrystalline-Si based electrothermal actuators with reproducible performance.

AB - Polycrystalline-Si microactuators based on electrothermal principles exhibit many interesting features but their practical use is severely limited by permanent damage that may occur due to accidental overheating. Under these conditions, polycrystalline-Si structures will display irreversible structural changes ranging from slight geometrical deformations to complete damage. In this paper, an approach is presented to avoid permanent structural deformation of B-doped polycrystalline-Si based electrothermal actuators by overheating. The method allows us to distinguish reversible and irreversible actuation conditions and is demonstrated under environmental and vacuum conditions. It enables full utilization of the capabilities of B-doped polycrystalline-Si based electrothermal actuators with reproducible performance.

U2 - 10.1088/0960-1317/14/9/005

DO - 10.1088/0960-1317/14/9/005

M3 - Article

SN - 0960-1317

VL - 14

SP - S31-S36

JO - Journal of micromechanics and microengineering

JF - Journal of micromechanics and microengineering

IS - 9

T2 - 14th MicroMechanics Europe Workshop, MME 2003

Y2 - 2 November 2003 through 4 November 2003

ER -

Distinction of the irreversible and reversible actuation regions of b-doped poly-si based electrothermal actuators

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Research output

Distinction of the irreversible and reversible actuation regions of B-doped poly-Si based elctrothermal actuators

Cite this