Distinction of the irreversible and reversible actuation regions of b-doped poly-si based electrothermal actuators

S. Deladi, G.J.M. Krijnen, M.C. Elwenspoek

Research output: Contribution to journal › Article › Academic › peer-review

6 Citations (Scopus)

6 Citations
1 Conference contribution

1 results

2003

Distinction of the irreversible and reversible actuation regions of B-doped poly-Si based elctrothermal actuators
Deladi, S., Krijnen, G. J. M. & Elwenspoek, M. C., 2003, Proceedings of the MME Conference 2003. Delft, p. 49-52
Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review