Distinction of the irreversible and reversible actuation regions of b-doped poly-si based electrothermal actuators

S. Deladi
, G.J.M. Krijnen
, M.C. Elwenspoek

Research output: Contribution to journal › Article › Academic › peer-review

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2003

Distinction of the irreversible and reversible actuation regions of B-doped poly-Si based elctrothermal actuators
Deladi, S., Krijnen, G. J. M. & Elwenspoek, M. C., 2003, Proceedings of the MME Conference 2003. Delft, p. 49-52
Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review